JPH0377272B2 - - Google Patents

Info

Publication number

JPH0377272B2

JPH0377272B2 JP15785385A JP15785385A JPH0377272B2 JP H0377272 B2 JPH0377272 B2 JP H0377272B2 JP 15785385 A JP15785385 A JP 15785385A JP 15785385 A JP15785385 A JP 15785385A JP H0377272 B2 JPH0377272 B2 JP H0377272B2

Authority

JP

Japan

Prior art keywords

coating

temperature

coating layer

substrate

titanium

Prior art date

1985-07-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

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• 238000000576 coating method Methods 0.000 claims description 73
• 239000011248 coating agent Substances 0.000 claims description 72
• 239000011247 coating layer Substances 0.000 claims description 48
• 239000000758 substrate Substances 0.000 claims description 42
• 238000005520 cutting process Methods 0.000 claims description 26
• 229910000997 High-speed steel Inorganic materials 0.000 claims description 24
• 238000004519 manufacturing process Methods 0.000 claims description 16
• 238000000034 method Methods 0.000 claims description 16
• 239000010936 titanium Substances 0.000 claims description 13
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 11
• 229910052719 titanium Inorganic materials 0.000 claims description 11
• NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 8
• 238000005240 physical vapour deposition Methods 0.000 claims description 7
• MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 7
• 239000010410 layer Substances 0.000 claims description 3
• FOZHTJJTSSSURD-UHFFFAOYSA-J titanium(4+);dicarbonate Chemical compound [Ti+4].[O-]C([O-])=O.[O-]C([O-])=O FOZHTJJTSSSURD-UHFFFAOYSA-J 0.000 claims description 2
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
• 238000005496 tempering Methods 0.000 description 5
• 238000009792 diffusion process Methods 0.000 description 4
• 238000005530 etching Methods 0.000 description 4
• 150000003609 titanium compounds Chemical class 0.000 description 4
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
• 229910052786 argon Inorganic materials 0.000 description 3
• 229910052799 carbon Inorganic materials 0.000 description 3
• 230000000052 comparative effect Effects 0.000 description 3
• 238000001816 cooling Methods 0.000 description 3
• 230000000694 effects Effects 0.000 description 3
• 239000000463 material Substances 0.000 description 3
• 150000004767 nitrides Chemical class 0.000 description 3
• HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
• 238000010894 electron beam technology Methods 0.000 description 2
• 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
• 238000010438 heat treatment Methods 0.000 description 2
• 150000002500 ions Chemical class 0.000 description 2
• 231100000989 no adverse effect Toxicity 0.000 description 2
• UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
• 229910000831 Steel Inorganic materials 0.000 description 1
• -1 Ti + Chemical class 0.000 description 1
• ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
• PIZYHTQSHRQOBI-UHFFFAOYSA-N [C].O=[N] Chemical compound [C].O=[N] PIZYHTQSHRQOBI-UHFFFAOYSA-N 0.000 description 1
• CYKMNKXPYXUVPR-UHFFFAOYSA-N [C].[Ti] Chemical compound [C].[Ti] CYKMNKXPYXUVPR-UHFFFAOYSA-N 0.000 description 1
• RGSBWMSEZLEFRP-UHFFFAOYSA-N [N]=O.[Ti].[C] Chemical compound [N]=O.[Ti].[C] RGSBWMSEZLEFRP-UHFFFAOYSA-N 0.000 description 1
• 150000001768 cations Chemical class 0.000 description 1
• 239000003610 charcoal Substances 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 229910001873 dinitrogen Inorganic materials 0.000 description 1
• 239000007789 gas Substances 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 150000002823 nitrates Chemical class 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1
• 238000003825 pressing Methods 0.000 description 1
• 239000012495 reaction gas Substances 0.000 description 1
• 239000010959 steel Substances 0.000 description 1
• 239000002436 steel type Substances 0.000 description 1
• 239000002345 surface coating layer Substances 0.000 description 1
• OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
• 230000009466 transformation Effects 0.000 description 1
• 238000003466 welding Methods 0.000 description 1