JPH0376843B2 - - Google Patents
Info
- Publication number
- JPH0376843B2 JPH0376843B2 JP59145697A JP14569784A JPH0376843B2 JP H0376843 B2 JPH0376843 B2 JP H0376843B2 JP 59145697 A JP59145697 A JP 59145697A JP 14569784 A JP14569784 A JP 14569784A JP H0376843 B2 JPH0376843 B2 JP H0376843B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- diffraction grating
- laser light
- plane
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000005259 measurement Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/30—Grating as beam-splitter
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14569784A JPS6123902A (ja) | 1984-07-12 | 1984-07-12 | 座標軸設定用干渉計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14569784A JPS6123902A (ja) | 1984-07-12 | 1984-07-12 | 座標軸設定用干渉計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6123902A JPS6123902A (ja) | 1986-02-01 |
JPH0376843B2 true JPH0376843B2 (fr) | 1991-12-06 |
Family
ID=15391012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14569784A Granted JPS6123902A (ja) | 1984-07-12 | 1984-07-12 | 座標軸設定用干渉計 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6123902A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5206706A (en) * | 1991-07-01 | 1993-04-27 | Bell Communications Research, Inc. | Alignment of an ellipsometer or other optical instrument using a diffraction grating |
DE19602445A1 (de) | 1996-01-24 | 1997-07-31 | Nanopro Luftlager Produktions | Vorrichtung und Verfahren zum Vermessen von zwei einander gegenüberliegenden Oberflächen eines Körpers |
US7057741B1 (en) | 1999-06-18 | 2006-06-06 | Kla-Tencor Corporation | Reduced coherence symmetric grazing incidence differential interferometer |
-
1984
- 1984-07-12 JP JP14569784A patent/JPS6123902A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6123902A (ja) | 1986-02-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP3207339B1 (fr) | Systèmes de codeur interférométrique | |
US8988690B2 (en) | Interferometric encoder systems | |
US6757066B2 (en) | Multiple degree of freedom interferometer | |
KR102061632B1 (ko) | 격자 측정 장치 | |
KR20000070669A (ko) | 간섭계 시스템 및 이를 포함하는 전사장치 | |
US4880308A (en) | Aligning apparatus | |
JP2004144581A (ja) | 変位検出装置 | |
JPS58191907A (ja) | 移動量測定方法 | |
JPS63277926A (ja) | 測長装置 | |
JPH03146822A (ja) | エンコーダー | |
US4395123A (en) | Interferometric angle monitor | |
JPH0376843B2 (fr) | ||
JPH0781884B2 (ja) | 光学式変位測定装置 | |
JPH0447222A (ja) | 高精度位置比較装置 | |
JPH0416177Y2 (fr) | ||
JP3045567B2 (ja) | 移動体位置測定装置 | |
JP2007285967A (ja) | レーザ測長機 | |
JP3411691B2 (ja) | 真直度測定法 | |
JPS61178613A (ja) | エンコーダー | |
JPH01284716A (ja) | エンコーダー | |
JPS6097215A (ja) | 測長装置 | |
JP3028848B2 (ja) | 位置測定装置 | |
JP3393910B2 (ja) | 表面形状測定方法 | |
JPH05172518A (ja) | 高精度座標測定装置 | |
JPH02297010A (ja) | 測長装置 |