JPH0375084B2 - - Google Patents

Info

Publication number
JPH0375084B2
JPH0375084B2 JP9822887A JP9822887A JPH0375084B2 JP H0375084 B2 JPH0375084 B2 JP H0375084B2 JP 9822887 A JP9822887 A JP 9822887A JP 9822887 A JP9822887 A JP 9822887A JP H0375084 B2 JPH0375084 B2 JP H0375084B2
Authority
JP
Japan
Prior art keywords
circuit
matching
load
branch
matching device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9822887A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63264893A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9822887A priority Critical patent/JPS63264893A/ja
Publication of JPS63264893A publication Critical patent/JPS63264893A/ja
Publication of JPH0375084B2 publication Critical patent/JPH0375084B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constitution Of High-Frequency Heating (AREA)
  • Drying Of Semiconductors (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)
JP9822887A 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路 Granted JPS63264893A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9822887A JPS63264893A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9822887A JPS63264893A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Publications (2)

Publication Number Publication Date
JPS63264893A JPS63264893A (ja) 1988-11-01
JPH0375084B2 true JPH0375084B2 (https=) 1991-11-29

Family

ID=14214101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9822887A Granted JPS63264893A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Country Status (1)

Country Link
JP (1) JPS63264893A (https=)

Also Published As

Publication number Publication date
JPS63264893A (ja) 1988-11-01

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

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R250 Receipt of annual fees

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LAPS Cancellation because of no payment of annual fees