JPH0375046B2 - - Google Patents

Info

Publication number
JPH0375046B2
JPH0375046B2 JP60191269A JP19126985A JPH0375046B2 JP H0375046 B2 JPH0375046 B2 JP H0375046B2 JP 60191269 A JP60191269 A JP 60191269A JP 19126985 A JP19126985 A JP 19126985A JP H0375046 B2 JPH0375046 B2 JP H0375046B2
Authority
JP
Japan
Prior art keywords
pattern
difference
width
length measurement
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60191269A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62103510A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP60191269A priority Critical patent/JPS62103510A/ja
Publication of JPS62103510A publication Critical patent/JPS62103510A/ja
Publication of JPH0375046B2 publication Critical patent/JPH0375046B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP60191269A 1985-08-30 1985-08-30 パタ−ン測長方法 Granted JPS62103510A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60191269A JPS62103510A (ja) 1985-08-30 1985-08-30 パタ−ン測長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60191269A JPS62103510A (ja) 1985-08-30 1985-08-30 パタ−ン測長方法

Publications (2)

Publication Number Publication Date
JPS62103510A JPS62103510A (ja) 1987-05-14
JPH0375046B2 true JPH0375046B2 (enrdf_load_stackoverflow) 1991-11-28

Family

ID=16271732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60191269A Granted JPS62103510A (ja) 1985-08-30 1985-08-30 パタ−ン測長方法

Country Status (1)

Country Link
JP (1) JPS62103510A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0756447B2 (ja) * 1990-03-22 1995-06-14 日本電子株式会社 測長方法
JP5069814B2 (ja) * 2004-11-19 2012-11-07 株式会社ホロン 測定値の判定方法
JP5090545B2 (ja) * 2004-11-19 2012-12-05 株式会社ホロン 測定値の判定方法
JP4835481B2 (ja) * 2007-03-20 2011-12-14 凸版印刷株式会社 レジストパターン測定方法及びレジストパターン測定装置
JP5402458B2 (ja) * 2009-09-24 2014-01-29 凸版印刷株式会社 微細パターン測定方法及び微細パターン測定装置

Also Published As

Publication number Publication date
JPS62103510A (ja) 1987-05-14

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