JPH0374926B2 - - Google Patents
Info
- Publication number
- JPH0374926B2 JPH0374926B2 JP26078284A JP26078284A JPH0374926B2 JP H0374926 B2 JPH0374926 B2 JP H0374926B2 JP 26078284 A JP26078284 A JP 26078284A JP 26078284 A JP26078284 A JP 26078284A JP H0374926 B2 JPH0374926 B2 JP H0374926B2
- Authority
- JP
- Japan
- Prior art keywords
- cantilever beam
- cantilever
- slit
- rotation
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 6
- 238000000866 electrolytic etching Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59260782A JPS61139719A (ja) | 1984-12-12 | 1984-12-12 | 半導体回転センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59260782A JPS61139719A (ja) | 1984-12-12 | 1984-12-12 | 半導体回転センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61139719A JPS61139719A (ja) | 1986-06-27 |
| JPH0374926B2 true JPH0374926B2 (OSRAM) | 1991-11-28 |
Family
ID=17352650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59260782A Granted JPS61139719A (ja) | 1984-12-12 | 1984-12-12 | 半導体回転センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61139719A (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05240874A (ja) * | 1991-12-06 | 1993-09-21 | Canon Inc | 角速度センサ |
| US5734105A (en) | 1992-10-13 | 1998-03-31 | Nippondenso Co., Ltd. | Dynamic quantity sensor |
| JP3028766B2 (ja) | 1995-12-05 | 2000-04-04 | 株式会社村田製作所 | 角速度センサ |
| JP2011237390A (ja) * | 2010-05-13 | 2011-11-24 | Gunma Univ | 加速度センサ |
-
1984
- 1984-12-12 JP JP59260782A patent/JPS61139719A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61139719A (ja) | 1986-06-27 |
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