JPH0374362B2 - - Google Patents
Info
- Publication number
- JPH0374362B2 JPH0374362B2 JP58116140A JP11614083A JPH0374362B2 JP H0374362 B2 JPH0374362 B2 JP H0374362B2 JP 58116140 A JP58116140 A JP 58116140A JP 11614083 A JP11614083 A JP 11614083A JP H0374362 B2 JPH0374362 B2 JP H0374362B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- photoresist
- beam resist
- ion
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 24
- 229920002120 photoresistant polymer Polymers 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 11
- 238000000992 sputter etching Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 5
- 239000004926 polymethyl methacrylate Substances 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- -1 argon ions Chemical class 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000002508 contact lithography Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- SDIXRDNYIMOKSG-UHFFFAOYSA-L disodium methyl arsenate Chemical compound [Na+].[Na+].C[As]([O-])([O-])=O SDIXRDNYIMOKSG-UHFFFAOYSA-L 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11614083A JPS608802A (ja) | 1983-06-29 | 1983-06-29 | ブレ−ズド格子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11614083A JPS608802A (ja) | 1983-06-29 | 1983-06-29 | ブレ−ズド格子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS608802A JPS608802A (ja) | 1985-01-17 |
| JPH0374362B2 true JPH0374362B2 (de) | 1991-11-26 |
Family
ID=14679726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11614083A Granted JPS608802A (ja) | 1983-06-29 | 1983-06-29 | ブレ−ズド格子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS608802A (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0333304Y2 (de) * | 1985-10-14 | 1991-07-15 | ||
| JPS62179404A (ja) * | 1986-02-01 | 1987-08-06 | 雪ケ谷化学工業株式会社 | 化粧用塗布具 |
| AUPR483301A0 (en) * | 2001-05-08 | 2001-05-31 | Commonwealth Scientific And Industrial Research Organisation | An optical device and methods of manufacture |
| DE102009056934A1 (de) | 2009-12-04 | 2011-06-09 | Giesecke & Devrient Gmbh | Sicherheitselement, Wertdokument mit einem solchen Sicherheitselement sowie Herstellungsverfahren eines Sicherheitselementes |
| DE102010047250A1 (de) | 2009-12-04 | 2011-06-09 | Giesecke & Devrient Gmbh | Sicherheitselement, Wertdokument mit einem solchen Sicherheitselement sowie Herstellungsverfahren eines Sicherheitselementes |
| DE102011108242A1 (de) | 2011-07-21 | 2013-01-24 | Giesecke & Devrient Gmbh | Optisch variables Element, insbesondere Sicherheitselement |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55157705A (en) * | 1979-05-29 | 1980-12-08 | Nec Corp | Production of blazed grating |
| JPS5643620A (en) * | 1979-09-17 | 1981-04-22 | Mitsubishi Electric Corp | Production of blazed grating |
| JPS56113108A (en) * | 1980-02-12 | 1981-09-05 | Rikagaku Kenkyusho | Preparation for echelette grating |
-
1983
- 1983-06-29 JP JP11614083A patent/JPS608802A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55157705A (en) * | 1979-05-29 | 1980-12-08 | Nec Corp | Production of blazed grating |
| JPS5643620A (en) * | 1979-09-17 | 1981-04-22 | Mitsubishi Electric Corp | Production of blazed grating |
| JPS56113108A (en) * | 1980-02-12 | 1981-09-05 | Rikagaku Kenkyusho | Preparation for echelette grating |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS608802A (ja) | 1985-01-17 |
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