JPH0372601A - Film resistor - Google Patents

Film resistor

Info

Publication number
JPH0372601A
JPH0372601A JP1208790A JP20879089A JPH0372601A JP H0372601 A JPH0372601 A JP H0372601A JP 1208790 A JP1208790 A JP 1208790A JP 20879089 A JP20879089 A JP 20879089A JP H0372601 A JPH0372601 A JP H0372601A
Authority
JP
Japan
Prior art keywords
electrodes
film
trimming
resistance value
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1208790A
Other languages
Japanese (ja)
Inventor
Mitsuaki Uemura
植村 充明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Uchihashi Estec Co Ltd
Original Assignee
Uchihashi Estec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uchihashi Estec Co Ltd filed Critical Uchihashi Estec Co Ltd
Priority to JP1208790A priority Critical patent/JPH0372601A/en
Publication of JPH0372601A publication Critical patent/JPH0372601A/en
Pending legal-status Critical Current

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  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE:To lessen the change in the resistance values proportional to the increase in trimming length thereby enabling the resistance values to be minutely adjusted by a method wherein, for film resistor adjusting by cutting a trimming groove in film resistor between a pair of electrodes, the distance between the electrodes is made smaller as it goes in the width direction of an insulating substrate. CONSTITUTION:Film electrodes 2 provided on an insulating substrate 1 are separated from each other in the Y direction while the length l thereof is made smaller as it goes in the X direction. A trimming groove 4 is cut by laser irradiation in a film resistor 3 provided between the film electrodes 2 to adjust the resistance value. Through these procedures, the length l between the film electrodes 2 can be made as it goes in the width direction, thereby enabling the change smaller in the resistance values proportional to the increase of the trimming length to be smaller than that of any conventional film resistors.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は膜抵抗体の改良に関するものである。[Detailed description of the invention] <Industrial application field> The present invention relates to improvements in membrane resistors.

〈従来の技術〉 膜抵抗器、プリント回路の膜抵抗素子等の抵抗には、膜
抵抗に一対の電極を配設し電極間の抵抗値を所定値に調
fill L、たちのを用いている。
<Prior art> For resistors such as film resistors and film resistance elements in printed circuits, a resistor is used in which a pair of electrodes are arranged on the film resistor and the resistance value between the electrodes is adjusted to a predetermined value. .

而るに、この抵抗値のlx1節には、第2図に示すよう
に、l+方向にトリごフグ溝4′を入れていく方法を施
用している。すなわら、膜llL抗3°の当初の抵抗値
を所定値よりも低く設定しておき、トリミングと抵抗値
測定を交互に行い、所定抵抗値に達していなければトリ
ミングを続行し、所定抵抗値の範囲内に達していればト
リくングを停止して所定の許容範囲内で所定の抵抗値に
設定している。
As shown in FIG. 2, a method is applied to the lx1 node of this resistance value, in which a trigonal groove 4' is inserted in the l+ direction. In other words, the initial resistance value of the film LL resistance 3° is set lower than a predetermined value, and trimming and resistance value measurement are performed alternately.If the predetermined resistance value has not been reached, trimming is continued and the predetermined resistance is If the value is within the range, trig- ging is stopped and the resistance is set to a predetermined resistance value within a predetermined tolerance range.

〈解決しようとする課題〉 しかしながら、従来の膜抵抗体においては、トリミング
の進行位置に関係なく電極2°・2°間の鞄類1が一定
であり、トリミング進行に4Jiう)・り旦ングの長さ
増大に対する抵抗値変化が大である。
<Problem to be solved> However, in conventional film resistors, the distance between the electrodes 2° and 2° is constant regardless of the position in which the trimming progresses, and the distance between the electrodes 2° and 2° is constant, and the distance between the electrodes 2° and 2° is constant regardless of the position in which the trimming progresses. The change in resistance value as the length increases is large.

すなわち、第2図において、トリミング長さXのもとて
の抵抗値R(x)は、電極間距離をし、膜抵抗の厚みを
り、膜抵抗のIllをす、Jlli抗率をSとすれば であり、トリミングの長さ増大ΔXのもとての抵抗値変
化△R(x)は、 であり、トリミング長さXが大になるとΔXに対する抵
抗値変化、すなわちΔR(X)/ΔXが相当に大となる
。而して、抵抗値の微細81s1節が困難であり、荒い
調節となり設定抵抗値の許容範囲を大きくしなければな
らない。従って、膜抵抗体の小型化を図るうえに不利で
ある。
That is, in Fig. 2, the original resistance value R(x) of the trimming length Then, the original resistance value change ΔR(x) of the trimming length increase ΔX is as follows, and as the trimming length X increases, the resistance value change with respect to ΔX, that is, ΔR(X)/ΔX becomes quite large. Therefore, it is difficult to set the resistance value in a fine section 81s1, and the adjustment becomes rough, and the allowable range of the set resistance value must be widened. Therefore, this is disadvantageous in reducing the size of the membrane resistor.

本発明の目的は、トリミングの長さ増大に対する抵抗値
変化を小さくして、抵抗値の微細調節を可能にする膜抵
抗体を提供することにある。
An object of the present invention is to provide a film resistor that makes it possible to finely adjust the resistance value by reducing the change in resistance value as the length of trimming increases.

〈課題を解決するための手段〉 本発明に係る膜11(抗体は、絶縁基板上における長手
方向に間隔を隔てた一対の膜電極と電極間膜抵抗とを備
え、膜抵抗に抵抗値#A節用の巾方向のトリミング溝を
設けてなる抵抗体において、巾方向に至るほど電極間の
間隔を狭くしたことを特徴とする構成である。
<Means for Solving the Problems> The membrane 11 (antibody) according to the present invention comprises a pair of membrane electrodes spaced apart in the longitudinal direction on an insulating substrate and an inter-electrode membrane resistor, and the membrane resistor has a resistance value #A. This resistor is provided with trimming grooves in the width direction for knots, and is characterized in that the distance between the electrodes becomes narrower in the width direction.

〈実施例の説明〉 以下、図面により本発明の実施例について説明する。<Explanation of Examples> Embodiments of the present invention will be described below with reference to the drawings.

第1図は本発明の一実施例を示す平面説明図である。第
1図において1は絶縁基板例えばセラくックス板である
。2・2は絶縁基板上に設けた膜電極であり、Y方向(
長手方向)に隔てられており、その間隔lはX方向に至
るほど狭くしである。
FIG. 1 is an explanatory plan view showing one embodiment of the present invention. In FIG. 1, reference numeral 1 denotes an insulating substrate, such as a ceramic board. 2.2 is a membrane electrode provided on an insulating substrate, and is directed in the Y direction (
(longitudinal direction), and the distance 1 becomes narrower toward the X direction.

3は電極間に設けた膜抵抗である。4は抵抗値調節用の
トリミング溝であり、レザー照射により施され、絶縁基
板上から膜抵抗の中小量に達している。
3 is a membrane resistor provided between the electrodes. Reference numeral 4 denotes a trimming groove for adjusting the resistance value, which is formed by laser irradiation and reaches a medium to small amount of film resistance from the insulating substrate.

上記の膜電極は導電性金属粉末を混入した導電性塗料の
印刷・焼付けによって形成することができる。膜抵抗は
抵抗粉末例えば、酸化金属カーボン等を混入した抵抗塗
料の印刷・焼イリけによって形成することができる。
The above membrane electrode can be formed by printing and baking a conductive paint mixed with conductive metal powder. The film resistor can be formed by printing and baking a resistive paint mixed with a resistive powder such as metal oxide carbon.

また、絶縁基材上に抵抗膜を積層した基板の抵抗膜をエ
ツチングして膜抵抗を形成し、次いで、電極アルミを蒸
着、導電性塗料の印刷・焼付けによって形成することも
できる。
It is also possible to form a film resistor by etching the resistive film of a substrate in which a resistive film is laminated on an insulating base material, then vapor depositing electrode aluminum, and printing/baking a conductive paint.

上記において、X方向のある位渡における電極間比熱を
l (x)、1模抵抗の厚みをt、111をb、トリミ
ング溝さをX、膜抵抗の抵抗率をSとすれば、電極間抵
抗値r (x)はほぼ次式で示される。
In the above, if the specific heat between the electrodes at a certain point in the The resistance value r (x) is approximately expressed by the following equation.

また、トリミングの長さ増大がΔXであるときの抵抗値
変化△r (x)は、 となる。
Further, the resistance value change Δr (x) when the trimming length increase is ΔX is as follows.

而るに、第1図において、電極間の距till 41!
 (X)を、1(x)=L−kx とすれば、 Δr (x) <ΔR(x)  −■ を満たすようにkを選定できる。
In Fig. 1, the distance between the electrodes is still 41!
If (X) is set as 1(x)=L−kx, then k can be selected so as to satisfy Δr (x) <ΔR(x) −■.

従って、本発1!11に係る膜抵抗体においては、トリ
ミング長さの増大に対する抵抗値変化を、従来の膜抵抗
体より小さくすることが可能であり、トリミングによる
抵抗値の微細調節が可能となる。
Therefore, in the film resistor according to the present invention 1!11, it is possible to make the change in resistance value with respect to an increase in the trimming length smaller than that of the conventional film resistor, and it is possible to finely adjust the resistance value by trimming. Become.

上記において、Xの増大に対する電極間間隔の減少の仕
方については、直線的に減少させるより双曲線的に減少
させる方が有利である。
In the above, regarding the method of decreasing the inter-electrode spacing with respect to the increase in X, it is more advantageous to decrease it hyperbolically rather than linearly.

本発明は両サイドからトリミングすることもでき、この
場合は各トリ珈ングの進行方間に対して電極間間隔を狭
くすることが必要である。また、トリミングにLカット
、Jカット法等を使用することもできる 〈発明の効果〉 上述した通り、本発明に係る膜抵抗体においては、トリ
ミングの長さ増大に対する抵抗値の変化量を小さくでき
るから、微細な抵抗値調節が可能であり、超小型の膜抵
抗器、プリンI・回路の膜抵抗体として有用である。
The present invention can also perform trimming from both sides, in which case it is necessary to narrow the inter-electrode spacing with respect to the progress of each trimming. Furthermore, L-cut, J-cut, etc. can be used for trimming. <Effects of the Invention> As described above, in the film resistor according to the present invention, the amount of change in resistance value with respect to increase in trimming length can be reduced. Therefore, it is possible to finely adjust the resistance value, and it is useful as an ultra-small film resistor or a film resistor for a circuit.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す説明図、第2図は従来
例を示す説明図である。 1・・・・・・絶縁基板 2・・・・・・膜電極 3・
・・・・・膜抵抗4・・・・・・トリミング溝
FIG. 1 is an explanatory diagram showing one embodiment of the present invention, and FIG. 2 is an explanatory diagram showing a conventional example. 1...Insulating substrate 2...Membrane electrode 3.
...Membrane resistor 4...Trimming groove

Claims (1)

【特許請求の範囲】[Claims]  絶縁基板上における長手方向に間隔を隔てた一対の膜
電極と電極間膜抵抗とを備え、膜抵抗に抵抗値調節用の
巾方向のトリミング溝を設けてなる抵抗体において、巾
方向に至るほど電極間の間隔を狭くしたことを特徴とす
る膜抵抗体。
In a resistor comprising a pair of membrane electrodes spaced apart in the longitudinal direction on an insulating substrate and an inter-electrode membrane resistor, the membrane resistor is provided with a trimming groove in the width direction for adjusting the resistance value. A membrane resistor characterized by narrower spacing between electrodes.
JP1208790A 1989-08-11 1989-08-11 Film resistor Pending JPH0372601A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1208790A JPH0372601A (en) 1989-08-11 1989-08-11 Film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1208790A JPH0372601A (en) 1989-08-11 1989-08-11 Film resistor

Publications (1)

Publication Number Publication Date
JPH0372601A true JPH0372601A (en) 1991-03-27

Family

ID=16562157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1208790A Pending JPH0372601A (en) 1989-08-11 1989-08-11 Film resistor

Country Status (1)

Country Link
JP (1) JPH0372601A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7394344B2 (en) * 2004-02-27 2008-07-01 Rohm Co., Ltd. Chip resistor and method for manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7394344B2 (en) * 2004-02-27 2008-07-01 Rohm Co., Ltd. Chip resistor and method for manufacturing the same

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