JPH037257U - - Google Patents
Info
- Publication number
- JPH037257U JPH037257U JP6839089U JP6839089U JPH037257U JP H037257 U JPH037257 U JP H037257U JP 6839089 U JP6839089 U JP 6839089U JP 6839089 U JP6839089 U JP 6839089U JP H037257 U JPH037257 U JP H037257U
- Authority
- JP
- Japan
- Prior art keywords
- position adjustment
- analysis sample
- electron beam
- beam scanning
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 4
- 239000004973 liquid crystal related substance Substances 0.000 claims description 3
- 238000012634 optical imaging Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6839089U JPH037257U (fr) | 1989-06-12 | 1989-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6839089U JPH037257U (fr) | 1989-06-12 | 1989-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH037257U true JPH037257U (fr) | 1991-01-24 |
Family
ID=31602789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6839089U Pending JPH037257U (fr) | 1989-06-12 | 1989-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037257U (fr) |
-
1989
- 1989-06-12 JP JP6839089U patent/JPH037257U/ja active Pending
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