JPH037257U - - Google Patents
Info
- Publication number
- JPH037257U JPH037257U JP6839089U JP6839089U JPH037257U JP H037257 U JPH037257 U JP H037257U JP 6839089 U JP6839089 U JP 6839089U JP 6839089 U JP6839089 U JP 6839089U JP H037257 U JPH037257 U JP H037257U
- Authority
- JP
- Japan
- Prior art keywords
- position adjustment
- analysis sample
- electron beam
- beam scanning
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 4
- 239000004973 liquid crystal related substance Substances 0.000 claims description 3
- 238000012634 optical imaging Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本発明にかかる電子線走査型試料映像
装置の一構成部である真空チヤンバの内部の様子
を液晶デイスプレイとともに示す模式図、第２図
は従来の電子線走査型試料映像装置の外観図であ
る。
１０……真空チヤンバ、２０……電子光学系、
３０……観察光学系、４０……ＣＣＤカメラ、５
０……液晶デイスプレイ、８０……分析試料、９
０……試料ステージ。
Fig. 1 is a schematic diagram showing the inside of a vacuum chamber, which is a component of the electron beam scanning sample imaging device according to the present invention, together with a liquid crystal display, and Fig. 2 is an external view of a conventional electron beam scanning sample imaging device. It is a diagram. 10... Vacuum chamber, 20... Electron optical system,
30... Observation optical system, 40... CCD camera, 5
0...Liquid crystal display, 80...Analysis sample, 9
0...Sample stage.
Claims (1)
でもつて位置決めされた分析試料の拡大画像を得
る電子線走査型試料映像装置であつて、前記分析
試料を撮影する位置調整用光学撮像部と、真空チ
ヤンバの外部の周りに設けてあり、前記位置調整
用光学撮像部から出力された画像データに基づい
て前記分析試料の写し出す液晶デイスプレイとを
具備していることを特徴とする電子線走査型試料
映像装置。 An electron beam scanning sample imaging device that obtains an enlarged image of an analysis sample positioned on a position adjustment table placed in a vacuum chamber, the apparatus comprising: a position adjustment optical imaging section for photographing the analysis sample; An electron beam scanning sample imaging device, characterized in that it is provided around the outside and includes a liquid crystal display that displays the analysis sample based on image data output from the position adjustment optical imaging section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6839089U JPH037257U (en) | 1989-06-12 | 1989-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6839089U JPH037257U (en) | 1989-06-12 | 1989-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH037257U true JPH037257U (en) | 1991-01-24 |
Family
ID=31602789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6839089U Pending JPH037257U (en) | 1989-06-12 | 1989-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037257U (en) |
-
1989
- 1989-06-12 JP JP6839089U patent/JPH037257U/ja active Pending
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