JPH0367061U - - Google Patents

Info

Publication number
JPH0367061U
JPH0367061U JP12835289U JP12835289U JPH0367061U JP H0367061 U JPH0367061 U JP H0367061U JP 12835289 U JP12835289 U JP 12835289U JP 12835289 U JP12835289 U JP 12835289U JP H0367061 U JPH0367061 U JP H0367061U
Authority
JP
Japan
Prior art keywords
target
cooling plate
electromagnet
power supply
transported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12835289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12835289U priority Critical patent/JPH0367061U/ja
Publication of JPH0367061U publication Critical patent/JPH0367061U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP12835289U 1989-11-01 1989-11-01 Pending JPH0367061U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12835289U JPH0367061U (enrdf_load_stackoverflow) 1989-11-01 1989-11-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12835289U JPH0367061U (enrdf_load_stackoverflow) 1989-11-01 1989-11-01

Publications (1)

Publication Number Publication Date
JPH0367061U true JPH0367061U (enrdf_load_stackoverflow) 1991-06-28

Family

ID=31676064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12835289U Pending JPH0367061U (enrdf_load_stackoverflow) 1989-11-01 1989-11-01

Country Status (1)

Country Link
JP (1) JPH0367061U (enrdf_load_stackoverflow)

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