JPH0366929U - - Google Patents
Info
- Publication number
- JPH0366929U JPH0366929U JP12805989U JP12805989U JPH0366929U JP H0366929 U JPH0366929 U JP H0366929U JP 12805989 U JP12805989 U JP 12805989U JP 12805989 U JP12805989 U JP 12805989U JP H0366929 U JPH0366929 U JP H0366929U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- wafer
- jig
- semiconductor wafer
- air blowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12805989U JPH0366929U (ko) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12805989U JPH0366929U (ko) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0366929U true JPH0366929U (ko) | 1991-06-28 |
Family
ID=31675791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12805989U Pending JPH0366929U (ko) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0366929U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002302222A (ja) * | 2001-03-30 | 2002-10-18 | Sanki Eng Co Ltd | カーブベルトコンベヤ |
| JP2007001737A (ja) * | 2005-06-24 | 2007-01-11 | Maruyasu Kikai Kk | ベルトコンベヤ |
-
1989
- 1989-10-31 JP JP12805989U patent/JPH0366929U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002302222A (ja) * | 2001-03-30 | 2002-10-18 | Sanki Eng Co Ltd | カーブベルトコンベヤ |
| JP4638074B2 (ja) * | 2001-03-30 | 2011-02-23 | 三機工業株式会社 | カーブベルトコンベヤ |
| JP2007001737A (ja) * | 2005-06-24 | 2007-01-11 | Maruyasu Kikai Kk | ベルトコンベヤ |