JPH0366928U - - Google Patents
Info
- Publication number
- JPH0366928U JPH0366928U JP12798589U JP12798589U JPH0366928U JP H0366928 U JPH0366928 U JP H0366928U JP 12798589 U JP12798589 U JP 12798589U JP 12798589 U JP12798589 U JP 12798589U JP H0366928 U JPH0366928 U JP H0366928U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- arm
- arm body
- suction part
- filling groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 3
- 239000010453 quartz Substances 0.000 claims 1
- -1 respectively Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 claims 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127985U JPH0721458Y2 (ja) | 1989-10-31 | 1989-10-31 | ウエハ搬送アーム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127985U JPH0721458Y2 (ja) | 1989-10-31 | 1989-10-31 | ウエハ搬送アーム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0366928U true JPH0366928U (de) | 1991-06-28 |
| JPH0721458Y2 JPH0721458Y2 (ja) | 1995-05-17 |
Family
ID=31675718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989127985U Expired - Lifetime JPH0721458Y2 (ja) | 1989-10-31 | 1989-10-31 | ウエハ搬送アーム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721458Y2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005335023A (ja) * | 2004-05-28 | 2005-12-08 | Nippon Steel Corp | 被加熱対象物の吸引式搬送装置 |
| JP2018019015A (ja) * | 2016-07-29 | 2018-02-01 | 株式会社アルバック | 基板搬送ロボット、真空処理装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50136566A (de) * | 1974-04-15 | 1975-10-29 | ||
| JPS5314350A (en) * | 1976-07-27 | 1978-02-08 | Mitsubishi Electric Corp | Current detector |
| JPS6395241U (de) * | 1986-12-12 | 1988-06-20 | ||
| JPS63160222A (ja) * | 1986-12-23 | 1988-07-04 | Mitsubishi Electric Corp | ウエハホルダ |
| JPH0164387U (de) * | 1987-10-16 | 1989-04-25 |
-
1989
- 1989-10-31 JP JP1989127985U patent/JPH0721458Y2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50136566A (de) * | 1974-04-15 | 1975-10-29 | ||
| JPS5314350A (en) * | 1976-07-27 | 1978-02-08 | Mitsubishi Electric Corp | Current detector |
| JPS6395241U (de) * | 1986-12-12 | 1988-06-20 | ||
| JPS63160222A (ja) * | 1986-12-23 | 1988-07-04 | Mitsubishi Electric Corp | ウエハホルダ |
| JPH0164387U (de) * | 1987-10-16 | 1989-04-25 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005335023A (ja) * | 2004-05-28 | 2005-12-08 | Nippon Steel Corp | 被加熱対象物の吸引式搬送装置 |
| JP4494871B2 (ja) * | 2004-05-28 | 2010-06-30 | 新日本製鐵株式会社 | 赤熱鋼板の吸引式搬送装置 |
| JP2018019015A (ja) * | 2016-07-29 | 2018-02-01 | 株式会社アルバック | 基板搬送ロボット、真空処理装置 |
| CN107665845A (zh) * | 2016-07-29 | 2018-02-06 | 株式会社爱发科 | 基板搬运机器人及真空处理装置 |
| CN107665845B (zh) * | 2016-07-29 | 2023-04-14 | 株式会社爱发科 | 基板搬运机器人及真空处理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0721458Y2 (ja) | 1995-05-17 |