JPH0366928U - - Google Patents
Info
- Publication number
- JPH0366928U JPH0366928U JP12798589U JP12798589U JPH0366928U JP H0366928 U JPH0366928 U JP H0366928U JP 12798589 U JP12798589 U JP 12798589U JP 12798589 U JP12798589 U JP 12798589U JP H0366928 U JPH0366928 U JP H0366928U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- arm
- arm body
- suction part
- filling groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 3
- 239000010453 quartz Substances 0.000 claims 1
- -1 respectively Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 claims 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Description
第１図は本考案に係るウエハ搬送アームの平面
図、第２図はその縦断面図、第３図はウエハ搬送
アームの変形例を示す要部縦断面図、第４図はア
ーム旋回式基板搬送装置の斜視図である。
１１……アーム本体、１２……吸気連通路、１
３，１３ａ，１３ｂ……吸着口、１４……接着剤
充填溝、１５……耐熱接着剤、１６……ウエハ吸
着部。
Fig. 1 is a plan view of a wafer transfer arm according to the present invention, Fig. 2 is a longitudinal sectional view thereof, Fig. 3 is a longitudinal sectional view of main parts showing a modification of the wafer transfer arm, and Fig. 4 is an arm-swiveling board. It is a perspective view of a conveyance device. 11...Arm body, 12...Intake communication passage, 1
3, 13a, 13b...Suction port, 14...Adhesive filling groove, 15...Heat-resistant adhesive, 16...Wafer suction portion.
Claims (1)
端部へ亙り吸気連通路を形成し、先端部の上面に
吸着口を開口したウエハ吸着部を具備して成るウ
エハ搬送アームにおいて、 アーム本体を剛性材で、ウエハ吸着部を石英材
でそれぞれ別体に形成し、アーム本体又はウエハ
吸着部の少なくともいずれか一方の接合面に、接
着剤充填溝を吸着口の周囲に凹設し、接着剤充填
溝内に充填した接着剤でアーム本体とウエハ吸着
部とを接着することにより、両者を気密接合した
ことを特徴とするウエハ搬送アーム。[Claims for Utility Model Registration] The arm body is made of a thin plate material, and has an air intake passageway extending from the base end to the tip end, and is equipped with a wafer suction part with a suction port opened on the upper surface of the tip end. In the wafer transfer arm, the arm body is made of a rigid material and the wafer suction part is made of quartz material, respectively, and an adhesive filling groove is formed in the joint surface of at least one of the arm body or the wafer suction part at the suction port. A wafer transfer arm characterized in that an arm main body and a wafer adsorption section are hermetically joined by bonding the arm body and a wafer suction section with an adhesive filled in an adhesive filling groove formed in a recessed area around the periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127985U JPH0721458Y2 (en) | 1989-10-31 | 1989-10-31 | Wafer transfer arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989127985U JPH0721458Y2 (en) | 1989-10-31 | 1989-10-31 | Wafer transfer arm |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0366928U true JPH0366928U (en) | 1991-06-28 |
| JPH0721458Y2 JPH0721458Y2 (en) | 1995-05-17 |
Family
ID=31675718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989127985U Expired - Lifetime JPH0721458Y2 (en) | 1989-10-31 | 1989-10-31 | Wafer transfer arm |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721458Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005335023A (en) * | 2004-05-28 | 2005-12-08 | Nippon Steel Corp | Suction type conveying device for heated object |
| JP2018019015A (en) * | 2016-07-29 | 2018-02-01 | 株式会社アルバック | Substrate transport robot and vacuum processing equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50136566A (en) * | 1974-04-15 | 1975-10-29 | ||
| JPS5314350A (en) * | 1976-07-27 | 1978-02-08 | Mitsubishi Electric Corp | Current detector |
| JPS6395241U (en) * | 1986-12-12 | 1988-06-20 | ||
| JPS63160222A (en) * | 1986-12-23 | 1988-07-04 | Mitsubishi Electric Corp | Wafer holder |
| JPH0164387U (en) * | 1987-10-16 | 1989-04-25 |
-
1989
- 1989-10-31 JP JP1989127985U patent/JPH0721458Y2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50136566A (en) * | 1974-04-15 | 1975-10-29 | ||
| JPS5314350A (en) * | 1976-07-27 | 1978-02-08 | Mitsubishi Electric Corp | Current detector |
| JPS6395241U (en) * | 1986-12-12 | 1988-06-20 | ||
| JPS63160222A (en) * | 1986-12-23 | 1988-07-04 | Mitsubishi Electric Corp | Wafer holder |
| JPH0164387U (en) * | 1987-10-16 | 1989-04-25 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005335023A (en) * | 2004-05-28 | 2005-12-08 | Nippon Steel Corp | Suction type conveying device for heated object |
| JP4494871B2 (en) * | 2004-05-28 | 2010-06-30 | 新日本製鐵株式会社 | Suction-type conveying device for red hot steel sheet |
| JP2018019015A (en) * | 2016-07-29 | 2018-02-01 | 株式会社アルバック | Substrate transport robot and vacuum processing equipment |
| CN107665845A (en) * | 2016-07-29 | 2018-02-06 | 株式会社爱发科 | Board carrying machine people and vacuum treatment installation |
| CN107665845B (en) * | 2016-07-29 | 2023-04-14 | 株式会社爱发科 | Substrate transfer robot and vacuum processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0721458Y2 (en) | 1995-05-17 |