JPH0366395B2 - - Google Patents

Info

Publication number
JPH0366395B2
JPH0366395B2 JP63117025A JP11702588A JPH0366395B2 JP H0366395 B2 JPH0366395 B2 JP H0366395B2 JP 63117025 A JP63117025 A JP 63117025A JP 11702588 A JP11702588 A JP 11702588A JP H0366395 B2 JPH0366395 B2 JP H0366395B2
Authority
JP
Japan
Prior art keywords
electron beam
shadow mask
ferric chloride
chloride solution
beam passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63117025A
Other languages
English (en)
Japanese (ja)
Other versions
JPS64283A (en
JPH01283A (ja
Inventor
Koichiro Oka
Yutaka Tanaka
Makoto Harikae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP63-117025A priority Critical patent/JPH01283A/ja
Priority claimed from JP63-117025A external-priority patent/JPH01283A/ja
Publication of JPS64283A publication Critical patent/JPS64283A/ja
Publication of JPH01283A publication Critical patent/JPH01283A/ja
Publication of JPH0366395B2 publication Critical patent/JPH0366395B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/28—Acidic compositions for etching iron group metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
JP63-117025A 1988-05-16 シャドウマスクの製造方法 Granted JPH01283A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63-117025A JPH01283A (ja) 1988-05-16 シャドウマスクの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63-117025A JPH01283A (ja) 1988-05-16 シャドウマスクの製造方法

Publications (3)

Publication Number Publication Date
JPS64283A JPS64283A (en) 1989-01-05
JPH01283A JPH01283A (ja) 1989-01-05
JPH0366395B2 true JPH0366395B2 (cs) 1991-10-17

Family

ID=

Also Published As

Publication number Publication date
JPS64283A (en) 1989-01-05

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