JPH0366141U - - Google Patents

Info

Publication number
JPH0366141U
JPH0366141U JP12662589U JP12662589U JPH0366141U JP H0366141 U JPH0366141 U JP H0366141U JP 12662589 U JP12662589 U JP 12662589U JP 12662589 U JP12662589 U JP 12662589U JP H0366141 U JPH0366141 U JP H0366141U
Authority
JP
Japan
Prior art keywords
permanent magnet
plasma
ion source
magnet
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12662589U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12662589U priority Critical patent/JPH0366141U/ja
Publication of JPH0366141U publication Critical patent/JPH0366141U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例に於ける冷却構造を
示す断面図、第２図は従来の冷却構造のうちプラ
ズマ容器に永久磁石及び冷却水路を有するように
構成された一体型の冷却構造を示す断面図、第３
図は従来の冷却構造のうち冷却水路を有する永久
磁石収納容器とプラズマ容器とが分離された冷却
構造を示す断面図である。 １……永久磁石、２……プラズマ発生容器、３
……冷却水路、４……冷却水蓋、５……冷却水シ
ール用Ｏリング、６……永久磁石用収納容器、７
……冷却促進板、８……ネオプレンゴム、９……
入熱の主な流れ。

Claims (1)

    【実用新案登録請求の範囲】
  1. アーク放電容器内に生成されるプラズマの閉じ
    込めに永久磁石を配置するタイプのイオン源に於
    いて、アークプラズマの熱発生による真空容器の
    壁面及び永久磁石の温度上昇を抑えるための冷却
    機構に、永久磁石に接してプラズマ発生容器との
    間に熱伝導率の高い薄板を設けたことを特徴とす
    るイオン源の冷却構造。
JP12662589U 1989-10-31 1989-10-31 Pending JPH0366141U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12662589U JPH0366141U (ja) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12662589U JPH0366141U (ja) 1989-10-31 1989-10-31

Publications (1)

Publication Number Publication Date
JPH0366141U true JPH0366141U (ja) 1991-06-27

Family

ID=31674430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12662589U Pending JPH0366141U (ja) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0366141U (ja)

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