JPH0365240U - - Google Patents
Info
- Publication number
- JPH0365240U JPH0365240U JP12680389U JP12680389U JPH0365240U JP H0365240 U JPH0365240 U JP H0365240U JP 12680389 U JP12680389 U JP 12680389U JP 12680389 U JP12680389 U JP 12680389U JP H0365240 U JPH0365240 U JP H0365240U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- raw material
- vapor phase
- phase epitaxial
- preliminary chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 4
- 239000012808 vapor phase Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims description 2
- 238000010926 purge Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12680389U JPH0365240U (zh) | 1989-10-30 | 1989-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12680389U JPH0365240U (zh) | 1989-10-30 | 1989-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0365240U true JPH0365240U (zh) | 1991-06-25 |
Family
ID=31674594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12680389U Pending JPH0365240U (zh) | 1989-10-30 | 1989-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0365240U (zh) |
-
1989
- 1989-10-30 JP JP12680389U patent/JPH0365240U/ja active Pending
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