JPS62160536U - - Google Patents
Info
- Publication number
- JPS62160536U JPS62160536U JP4870486U JP4870486U JPS62160536U JP S62160536 U JPS62160536 U JP S62160536U JP 4870486 U JP4870486 U JP 4870486U JP 4870486 U JP4870486 U JP 4870486U JP S62160536 U JPS62160536 U JP S62160536U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- chamber
- evacuating
- partitioned
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4870486U JPS62160536U (zh) | 1986-04-01 | 1986-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4870486U JPS62160536U (zh) | 1986-04-01 | 1986-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62160536U true JPS62160536U (zh) | 1987-10-13 |
Family
ID=30870484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4870486U Pending JPS62160536U (zh) | 1986-04-01 | 1986-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62160536U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04137613A (ja) * | 1990-09-28 | 1992-05-12 | Handotai Process Kenkyusho:Kk | 半導体装置の製造装置 |
-
1986
- 1986-04-01 JP JP4870486U patent/JPS62160536U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04137613A (ja) * | 1990-09-28 | 1992-05-12 | Handotai Process Kenkyusho:Kk | 半導体装置の製造装置 |