JPS6221528U - - Google Patents
Info
- Publication number
- JPS6221528U JPS6221528U JP11266685U JP11266685U JPS6221528U JP S6221528 U JPS6221528 U JP S6221528U JP 11266685 U JP11266685 U JP 11266685U JP 11266685 U JP11266685 U JP 11266685U JP S6221528 U JPS6221528 U JP S6221528U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- induction heating
- frequency induction
- susceptor
- heating coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000006698 induction Effects 0.000 claims description 6
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11266685U JPS6221528U (zh) | 1985-07-23 | 1985-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11266685U JPS6221528U (zh) | 1985-07-23 | 1985-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6221528U true JPS6221528U (zh) | 1987-02-09 |
Family
ID=30993751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11266685U Pending JPS6221528U (zh) | 1985-07-23 | 1985-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6221528U (zh) |
-
1985
- 1985-07-23 JP JP11266685U patent/JPS6221528U/ja active Pending