JPH0364983B2 - - Google Patents
Info
- Publication number
- JPH0364983B2 JPH0364983B2 JP60043935A JP4393585A JPH0364983B2 JP H0364983 B2 JPH0364983 B2 JP H0364983B2 JP 60043935 A JP60043935 A JP 60043935A JP 4393585 A JP4393585 A JP 4393585A JP H0364983 B2 JPH0364983 B2 JP H0364983B2
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- sample
- sample chamber
- differential pumping
- pumping device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005086 pumping Methods 0.000 claims description 34
- 230000000903 blocking effect Effects 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims 5
- 239000000523 sample Substances 0.000 description 67
- 239000007789 gas Substances 0.000 description 36
- 239000002245 particle Substances 0.000 description 27
- 150000002500 ions Chemical group 0.000 description 21
- 238000010884 ion-beam technique Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 108010083687 Ion Pumps Proteins 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 102000006391 Ion Pumps Human genes 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
- 238000004454 trace mineral analysis Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60043935A JPS61203548A (ja) | 1985-03-06 | 1985-03-06 | 差動排気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60043935A JPS61203548A (ja) | 1985-03-06 | 1985-03-06 | 差動排気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61203548A JPS61203548A (ja) | 1986-09-09 |
| JPH0364983B2 true JPH0364983B2 (fr) | 1991-10-09 |
Family
ID=12677545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60043935A Granted JPS61203548A (ja) | 1985-03-06 | 1985-03-06 | 差動排気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61203548A (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5327488A (en) * | 1976-08-27 | 1978-03-14 | Hitachi Ltd | Sample analyzer |
-
1985
- 1985-03-06 JP JP60043935A patent/JPS61203548A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5327488A (en) * | 1976-08-27 | 1978-03-14 | Hitachi Ltd | Sample analyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61203548A (ja) | 1986-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |