JPS61203548A - 差動排気装置 - Google Patents

差動排気装置

Info

Publication number
JPS61203548A
JPS61203548A JP60043935A JP4393585A JPS61203548A JP S61203548 A JPS61203548 A JP S61203548A JP 60043935 A JP60043935 A JP 60043935A JP 4393585 A JP4393585 A JP 4393585A JP S61203548 A JPS61203548 A JP S61203548A
Authority
JP
Japan
Prior art keywords
gas molecules
sample
cryo
sample chamber
panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60043935A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0364983B2 (fr
Inventor
Yoshikazu Honma
本間　芳和
Yoshiichi Ishii
芳一 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP60043935A priority Critical patent/JPS61203548A/ja
Publication of JPS61203548A publication Critical patent/JPS61203548A/ja
Publication of JPH0364983B2 publication Critical patent/JPH0364983B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP60043935A 1985-03-06 1985-03-06 差動排気装置 Granted JPS61203548A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60043935A JPS61203548A (ja) 1985-03-06 1985-03-06 差動排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60043935A JPS61203548A (ja) 1985-03-06 1985-03-06 差動排気装置

Publications (2)

Publication Number Publication Date
JPS61203548A true JPS61203548A (ja) 1986-09-09
JPH0364983B2 JPH0364983B2 (fr) 1991-10-09

Family

ID=12677545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60043935A Granted JPS61203548A (ja) 1985-03-06 1985-03-06 差動排気装置

Country Status (1)

Country Link
JP (1) JPS61203548A (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327488A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Sample analyzer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327488A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Sample analyzer

Also Published As

Publication number Publication date
JPH0364983B2 (fr) 1991-10-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term