JPH0364724B2 - - Google Patents

Info

Publication number
JPH0364724B2
JPH0364724B2 JP58163547A JP16354783A JPH0364724B2 JP H0364724 B2 JPH0364724 B2 JP H0364724B2 JP 58163547 A JP58163547 A JP 58163547A JP 16354783 A JP16354783 A JP 16354783A JP H0364724 B2 JPH0364724 B2 JP H0364724B2
Authority
JP
Japan
Prior art keywords
cylinder
vacuum
piston
rod
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58163547A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6057004A (ja
Inventor
Hiroshi Saeki
Yoichi Oonishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP16354783A priority Critical patent/JPS6057004A/ja
Publication of JPS6057004A publication Critical patent/JPS6057004A/ja
Publication of JPH0364724B2 publication Critical patent/JPH0364724B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP16354783A 1983-09-05 1983-09-05 真空装置用往復動シリンダ Granted JPS6057004A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16354783A JPS6057004A (ja) 1983-09-05 1983-09-05 真空装置用往復動シリンダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16354783A JPS6057004A (ja) 1983-09-05 1983-09-05 真空装置用往復動シリンダ

Publications (2)

Publication Number Publication Date
JPS6057004A JPS6057004A (ja) 1985-04-02
JPH0364724B2 true JPH0364724B2 (enrdf_load_stackoverflow) 1991-10-08

Family

ID=15775964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16354783A Granted JPS6057004A (ja) 1983-09-05 1983-09-05 真空装置用往復動シリンダ

Country Status (1)

Country Link
JP (1) JPS6057004A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293505A (ja) * 1985-10-16 1987-04-30 Teru Saamuko Kk ベロ−ズシ−ル付エアシリンダ
DE3601164A1 (de) * 1986-01-17 1987-07-23 Festo Kg Arbeitszylinderanordnung
JPS62174102U (enrdf_load_stackoverflow) * 1986-04-25 1987-11-05
JPH0648162Y2 (ja) * 1987-01-26 1994-12-12 日電アネルバ株式会社 真空室内直線運動導入機
JPS63188310U (enrdf_load_stackoverflow) * 1987-05-28 1988-12-02
JPH0187304U (enrdf_load_stackoverflow) * 1987-12-01 1989-06-09

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5142705A (en) * 1974-09-30 1976-04-12 Universal Oil Prod Co Tankasuisono tenkaho
JPS6024087Y2 (ja) * 1980-08-12 1985-07-18 石川島芝浦機械株式会社 延長整地板の取付装置

Also Published As

Publication number Publication date
JPS6057004A (ja) 1985-04-02

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