JPH0364724B2 - - Google Patents

Info

Publication number
JPH0364724B2
JPH0364724B2 JP58163547A JP16354783A JPH0364724B2 JP H0364724 B2 JPH0364724 B2 JP H0364724B2 JP 58163547 A JP58163547 A JP 58163547A JP 16354783 A JP16354783 A JP 16354783A JP H0364724 B2 JPH0364724 B2 JP H0364724B2
Authority
JP
Japan
Prior art keywords
cylinder
vacuum
piston
rod
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58163547A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6057004A (ja
Inventor
Hiroshi Saeki
Yoichi Oonishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58163547A priority Critical patent/JPS6057004A/ja
Publication of JPS6057004A publication Critical patent/JPS6057004A/ja
Publication of JPH0364724B2 publication Critical patent/JPH0364724B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP58163547A 1983-09-05 1983-09-05 真空装置用往復動シリンダ Granted JPS6057004A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58163547A JPS6057004A (ja) 1983-09-05 1983-09-05 真空装置用往復動シリンダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58163547A JPS6057004A (ja) 1983-09-05 1983-09-05 真空装置用往復動シリンダ

Publications (2)

Publication Number Publication Date
JPS6057004A JPS6057004A (ja) 1985-04-02
JPH0364724B2 true JPH0364724B2 (cs) 1991-10-08

Family

ID=15775964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58163547A Granted JPS6057004A (ja) 1983-09-05 1983-09-05 真空装置用往復動シリンダ

Country Status (1)

Country Link
JP (1) JPS6057004A (cs)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293505A (ja) * 1985-10-16 1987-04-30 Teru Saamuko Kk ベロ−ズシ−ル付エアシリンダ
DE3601164A1 (de) * 1986-01-17 1987-07-23 Festo Kg Arbeitszylinderanordnung
JPS62174102U (cs) * 1986-04-25 1987-11-05
JPH0648162Y2 (ja) * 1987-01-26 1994-12-12 日電アネルバ株式会社 真空室内直線運動導入機
JPS63188310U (cs) * 1987-05-28 1988-12-02
JPH0187304U (cs) * 1987-12-01 1989-06-09

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5142705A (en) * 1974-09-30 1976-04-12 Universal Oil Prod Co Tankasuisono tenkaho
JPS6024087Y2 (ja) * 1980-08-12 1985-07-18 石川島芝浦機械株式会社 延長整地板の取付装置

Also Published As

Publication number Publication date
JPS6057004A (ja) 1985-04-02

Similar Documents

Publication Publication Date Title
US4072210A (en) Compressor
ES8401575A1 (es) "una maquina de cilindro y piston de movimiento alternativo".
KR870011385A (ko) 왕복운동 밀폐형 전동기 콤프레서
JPH0364724B2 (cs)
EP0863311A3 (en) Liquid transfer pump
KR910017071A (ko) 전자 왕복운동 펌프
SE9500588L (sv) Luftpump
KR920008346A (ko) 피스톤식 압축기
EP1777473A3 (en) Stirling refrigerator
AU583952B2 (en) Hammer drill with a pneumatically driven striker piston
US4824336A (en) Vacuum pump
JPS54129262A (en) Disc brake
GB1239162A (cs)
US2640745A (en) Piston seal
JPS551452A (en) Electromagnetic air pump
GB2036168A (en) Diaphragm pumps
SE8004809L (sv) Tetning for vakuumpump
JPS5618137A (en) Air suspension device
JPH0415374A (ja) 流体圧ベローズシリンダ
GB1417240A (en) Piston compressors
FR2470874A1 (fr) Compresseur
JPS5970094U (ja) 回転式圧縮機
JPH0687601U (ja) 油圧装置用ピストン往復式気動モーター
JPH01187381A (ja) プランジャポンプ
JPS59141180U (ja) ダイアフラム式流体ポンプ