JPH0363933U - - Google Patents
Info
- Publication number
- JPH0363933U JPH0363933U JP12472489U JP12472489U JPH0363933U JP H0363933 U JPH0363933 U JP H0363933U JP 12472489 U JP12472489 U JP 12472489U JP 12472489 U JP12472489 U JP 12472489U JP H0363933 U JPH0363933 U JP H0363933U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- relay ring
- test head
- chip
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12472489U JPH0363933U (cs) | 1989-10-25 | 1989-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12472489U JPH0363933U (cs) | 1989-10-25 | 1989-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0363933U true JPH0363933U (cs) | 1991-06-21 |
Family
ID=31672629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12472489U Pending JPH0363933U (cs) | 1989-10-25 | 1989-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0363933U (cs) |
-
1989
- 1989-10-25 JP JP12472489U patent/JPH0363933U/ja active Pending
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