JPH0363581U - - Google Patents

Info

Publication number
JPH0363581U
JPH0363581U JP12506689U JP12506689U JPH0363581U JP H0363581 U JPH0363581 U JP H0363581U JP 12506689 U JP12506689 U JP 12506689U JP 12506689 U JP12506689 U JP 12506689U JP H0363581 U JPH0363581 U JP H0363581U
Authority
JP
Japan
Prior art keywords
inclined surface
little
quartz crucible
crucible
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12506689U
Other languages
Japanese (ja)
Other versions
JPH0730693Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989125066U priority Critical patent/JPH0730693Y2/en
Publication of JPH0363581U publication Critical patent/JPH0363581U/ja
Application granted granted Critical
Publication of JPH0730693Y2 publication Critical patent/JPH0730693Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の面取りをしていない石英ルツボ
の器壁の断面図、第２図および第３図は本考案の
面取り石英ルツボの器壁の断面図である。 α……傾斜面と上端面とのなす外角、β……傾
斜面と内壁面とのなす外角、ｌ……傾斜面の幅。 FIG. 1 is a sectional view of the wall of a conventional quartz crucible without chamfering, and FIGS. 2 and 3 are sectional views of the wall of a chamfered quartz crucible according to the present invention. α: External angle between the slope and the upper end surface, β: External angle between the slope and the inner wall surface, l: Width of the slope.

Claims (1)

【実用新案登録請求の範囲】 １ ルツボの上端内側の周縁部に傾斜面を設け、
該傾斜面と上端面および内面とのなす外角がいず
れも６０°以下であり、かつ、傾斜面の幅が１．
５mm以上であるシリコン単結晶引上げ用石英ルツ
ボ。 ２ 前記傾斜面を少しづつ角度を変えて複数の傾
斜面とした第１請求項の石英ルツボ。[Claims for Utility Model Registration] 1. An inclined surface is provided on the inner periphery of the upper end of the crucible,
The external angles formed by the inclined surface, the upper end surface, and the inner surface are all 60° or less, and the width of the inclined surface is 1.
A quartz crucible for pulling silicon single crystals with a diameter of 5 mm or more. 2. The quartz crucible according to claim 1, wherein the inclined surface is formed into a plurality of inclined surfaces by changing angles little by little.
JP1989125066U 1989-10-27 1989-10-27 Quartz crucible for pulling silicon single crystal Expired - Fee Related JPH0730693Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989125066U JPH0730693Y2 (en) 1989-10-27 1989-10-27 Quartz crucible for pulling silicon single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989125066U JPH0730693Y2 (en) 1989-10-27 1989-10-27 Quartz crucible for pulling silicon single crystal

Publications (2)

Publication Number Publication Date
JPH0363581U true JPH0363581U (en) 1991-06-20
JPH0730693Y2 JPH0730693Y2 (en) 1995-07-12

Family

ID=31672952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989125066U Expired - Fee Related JPH0730693Y2 (en) 1989-10-27 1989-10-27 Quartz crucible for pulling silicon single crystal

Country Status (1)

Country Link
JP (1) JPH0730693Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008002668A (en) * 2006-06-26 2008-01-10 Kurabo Ind Ltd Vacuum thermal insulating material
JPWO2017110763A1 (en) * 2015-12-21 2018-06-28 株式会社Sumco Silica glass crucible, silica glass crucible manufacturing method, silicon single crystal pulling apparatus, ingot and homoepitaxial wafer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345318A (en) * 1976-10-06 1978-04-24 Toshiba Ceramics Co Process and apparatus for preparing glass vessel and the like of high silica content
JPS62129069U (en) * 1986-02-05 1987-08-15
JPS63319288A (en) * 1987-06-23 1988-12-27 Shin Etsu Handotai Co Ltd Flanged quartz crucible

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345318A (en) * 1976-10-06 1978-04-24 Toshiba Ceramics Co Process and apparatus for preparing glass vessel and the like of high silica content
JPS62129069U (en) * 1986-02-05 1987-08-15
JPS63319288A (en) * 1987-06-23 1988-12-27 Shin Etsu Handotai Co Ltd Flanged quartz crucible

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008002668A (en) * 2006-06-26 2008-01-10 Kurabo Ind Ltd Vacuum thermal insulating material
JPWO2017110763A1 (en) * 2015-12-21 2018-06-28 株式会社Sumco Silica glass crucible, silica glass crucible manufacturing method, silicon single crystal pulling apparatus, ingot and homoepitaxial wafer

Also Published As

Publication number Publication date
JPH0730693Y2 (en) 1995-07-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees