Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP1986015321UpriorityCriticalpatent/JPH0616926Y2/en
Publication of JPS62129069UpublicationCriticalpatent/JPS62129069U/ja
Application grantedgrantedCritical
Publication of JPH0616926Y2publicationCriticalpatent/JPH0616926Y2/en
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed
(AREA)
Description
【図面の簡単な説明】[Brief explanation of drawings]
図面は本考案によるルツボの縦断面を示す。
The drawing shows a longitudinal section of a crucible according to the invention.
Claims (1)
【実用新案登録請求の範囲】
(1) ルツボ壁上縁付近の肉厚を他の部分の肉厚 よりも薄くしたことを特徴とする単結晶引き上げ 用石英ガラスルツボ。
(2) ルツボ壁上縁から１０〜５０mm下までの肉 厚が他の部分の肉厚の３０〜８０％であることを 特徴とする実用新案登録請求の範囲第１項記載の 石英ガラスルツボ。[Claims for Utility Model Registration] (1) A quartz glass crucible for pulling a single crystal, characterized in that the wall thickness near the upper edge of the crucible wall is thinner than the wall thickness of other parts. (2) The quartz glass crucible according to claim 1, wherein the wall thickness of the crucible wall from 10 to 50 mm below the upper edge is 30 to 80% of the thickness of other parts.
JP1986015321U1986-02-051986-02-05
Quartz glass crucible for pulling single crystal
Expired - LifetimeJPH0616926Y2
(en)