JPH0363566U - - Google Patents
Info
- Publication number
- JPH0363566U JPH0363566U JP12552989U JP12552989U JPH0363566U JP H0363566 U JPH0363566 U JP H0363566U JP 12552989 U JP12552989 U JP 12552989U JP 12552989 U JP12552989 U JP 12552989U JP H0363566 U JPH0363566 U JP H0363566U
- Authority
- JP
- Japan
- Prior art keywords
- metal material
- evaporation source
- semiconductor substrate
- evaporates
- windows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims 1
- 239000010419 fine particle Substances 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12552989U JPH0363566U (OSRAM) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12552989U JPH0363566U (OSRAM) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0363566U true JPH0363566U (OSRAM) | 1991-06-20 |
Family
ID=31673395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12552989U Pending JPH0363566U (OSRAM) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0363566U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11140633A (ja) * | 1997-11-06 | 1999-05-25 | Nippon Telegr & Teleph Corp <Ntt> | 薄膜堆積装置と堆積方法 |
-
1989
- 1989-10-26 JP JP12552989U patent/JPH0363566U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11140633A (ja) * | 1997-11-06 | 1999-05-25 | Nippon Telegr & Teleph Corp <Ntt> | 薄膜堆積装置と堆積方法 |
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