JPH0459049U - - Google Patents

Info

Publication number
JPH0459049U
JPH0459049U JP10273090U JP10273090U JPH0459049U JP H0459049 U JPH0459049 U JP H0459049U JP 10273090 U JP10273090 U JP 10273090U JP 10273090 U JP10273090 U JP 10273090U JP H0459049 U JPH0459049 U JP H0459049U
Authority
JP
Japan
Prior art keywords
ion beam
focused ion
substrate
shielding plate
fine slits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10273090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10273090U priority Critical patent/JPH0459049U/ja
Publication of JPH0459049U publication Critical patent/JPH0459049U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP10273090U 1990-09-28 1990-09-28 Pending JPH0459049U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10273090U JPH0459049U (OSRAM) 1990-09-28 1990-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10273090U JPH0459049U (OSRAM) 1990-09-28 1990-09-28

Publications (1)

Publication Number Publication Date
JPH0459049U true JPH0459049U (OSRAM) 1992-05-20

Family

ID=31847228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10273090U Pending JPH0459049U (OSRAM) 1990-09-28 1990-09-28

Country Status (1)

Country Link
JP (1) JPH0459049U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005197735A (ja) * 2004-01-06 2005-07-21 Internatl Business Mach Corp <Ibm> 電気的および物理的特徴付けのためのｍｏｓｆｅｔデバイスの裏面層剥離

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005197735A (ja) * 2004-01-06 2005-07-21 Internatl Business Mach Corp <Ibm> 電気的および物理的特徴付けのためのｍｏｓｆｅｔデバイスの裏面層剥離

Similar Documents

Publication Publication Date Title
KR960009822A (ko) 대전방지방법 및 대전방지용 이온 빔장치
KR970071953A (ko) 음이온 발생 방법 및 장치
JPH0459049U (OSRAM)
JPH0453630B2 (OSRAM)
EP0373599A3 (en) Method of determining the position of electron beam irradiation and device used in such method
JPS56125606A (en) Stereoscopic shape detector
JPH01155251U (OSRAM)
JPS6065967U (ja) 走査電子顕微鏡
JPS5937348Y2 (ja) レ−ザ加工装置
JPS60189852A (ja) イオンマイクロアナライザの試料微動装置
JPH06281799A (ja) レーザープラズマｘ線源
JPH0348854U (OSRAM)
JPH04147978A (ja) イオンビーム支援ｃｖｄ膜の形成方法
JPS6158941B2 (OSRAM)
JPH0397855U (OSRAM)
JPH0363566U (OSRAM)
JPH02148790U (OSRAM)
JPS6039181Y2 (ja) レ−ザ加工装置
JPS6314358U (OSRAM)
JPS63192586A (ja) レ−ザ加工方法
JPS5568061A (en) Scanning electronic microscope
JPS62157968U (OSRAM)
JPH0459942U (OSRAM)
JPS55133566A (en) Semiconductor device
JPH034299U (OSRAM)