JPH03630Y2 - - Google Patents
Info
- Publication number
- JPH03630Y2 JPH03630Y2 JP13531986U JP13531986U JPH03630Y2 JP H03630 Y2 JPH03630 Y2 JP H03630Y2 JP 13531986 U JP13531986 U JP 13531986U JP 13531986 U JP13531986 U JP 13531986U JP H03630 Y2 JPH03630 Y2 JP H03630Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve plate
- vacuum
- closed
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010586 diagram Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Actuator (AREA)
- Fluid-Driven Valves (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13531986U JPH03630Y2 (fr) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13531986U JPH03630Y2 (fr) | 1986-09-02 | 1986-09-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6340684U JPS6340684U (fr) | 1988-03-16 |
| JPH03630Y2 true JPH03630Y2 (fr) | 1991-01-10 |
Family
ID=31037395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13531986U Expired JPH03630Y2 (fr) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03630Y2 (fr) |
-
1986
- 1986-09-02 JP JP13531986U patent/JPH03630Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6340684U (fr) | 1988-03-16 |
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