JPH0363037B2 - - Google Patents
Info
- Publication number
- JPH0363037B2 JPH0363037B2 JP15106486A JP15106486A JPH0363037B2 JP H0363037 B2 JPH0363037 B2 JP H0363037B2 JP 15106486 A JP15106486 A JP 15106486A JP 15106486 A JP15106486 A JP 15106486A JP H0363037 B2 JPH0363037 B2 JP H0363037B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- electromagnet
- diaphragm
- intermediate table
- drive source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002401 inhibitory effect Effects 0.000 claims description 2
- 230000000452 restraining effect Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15106486A JPS636487A (ja) | 1986-06-26 | 1986-06-26 | Ｘ・ｙ・ｚ微動テ−ブル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15106486A JPS636487A (ja) | 1986-06-26 | 1986-06-26 | Ｘ・ｙ・ｚ微動テ−ブル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS636487A JPS636487A (ja) | 1988-01-12 |
| JPH0363037B2 true JPH0363037B2 (fr) | 1991-09-27 |
Family
ID=15510512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15106486A Granted JPS636487A (ja) | 1986-06-26 | 1986-06-26 | Ｘ・ｙ・ｚ微動テ−ブル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS636487A (fr) |
-
1986
- 1986-06-26 JP JP15106486A patent/JPS636487A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS636487A (ja) | 1988-01-12 |
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