JPH0362903A - Formation and correction of resistance of hybrid integrated circuit device - Google Patents

Abstract

PURPOSE:To make it possible to correct functions highly accurately by aligning the value of the combined resistance of a plurality of uncorrected resistor blocks to the minimum value required for correction before the adjustment of the functions. CONSTITUTION:It is generally known that the fluctuation in resistance values after correction with laser is largest immediately after cutting. Resistors for performing correction beforehand based on the measurement of a resistance value are provided so that the resistance value required for correcting functions is obtained. The correcting range for the function is suppressed to the minimum value. Thus, the cutting time when the functions are corrected can be shortened, and the change in characteristics after the correction can be suppressed. Namely, conductors are provided on a substrate, and resistors 12, 13 and 14 are formed. A part 15 is cut so that the combined resistance value of said resistors become the minimum value required for correcting the functions of the electric characteristics with the resistance value being measured. Then, coarse adjustment and fine adjustment are assigned to parts 16 by function correction, and the correction is performed.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a resistor formation method used in a hybrid integrated circuit device to adjust electrical functions such as DC voltage frequency and AC level with high precision by resistance modification. and a correction method.

Conventional technology Conventional function modification methods require high-precision modification.
As shown in Figure 2, a plurality of resistors (in Figure 8g2, two resistors are shown, but the number is not limited to two, and there may be multiple resistors) are connected to I was making corrections while taking measurements.

Problems to be Solved by the Invention In the conventional method, since it is necessary to absorb initial variations in resistance, it takes more time than necessary to correct one function. Furthermore, in the case of correction using a laser, the fluctuation value of the characteristics after functional correction becomes large. These issues are obstacles to high-precision functional modification.

The present invention is intended to solve these conventional problems, and aims to enable high-precision function modification.

Means for Solving the Problems In order to achieve the above objects, the present invention has the following objectives: (1) The resistance value range necessary for functional modification is determined by intercepting the circuit.

(2) It is generally known that the resistance value fluctuation after laser correction is greatest immediately after cutting.

Based on the above, in order to achieve the resistance value required for function correction, we have installed a resistance that can be corrected in advance by measuring the resistance value, and by keeping the range of function correction to the minimum, we can shorten the cutting time during function correction. This also makes it possible to compensate for changes in characteristics after modification.

Operation The present invention, with the above-described configuration, allows highly accurate function correction by providing a correction resistance based on resistance value measurement, thereby compensating for function correction time and characteristic fluctuations after correction.

Embodiment FIG. 1 is a block diagram of a resistor block according to an embodiment of the present invention. 1 is a printed conductor, 14 is a printed resistor with the same or different specific resistance, 16 is a cut portion by resistance value measurement, and 16 is a cut portion by functional modification of electrical characteristics.

A conductor is provided on the substrate, and (a) 12, 13° 1 as shown in the figure.
Forms a resistance of 4. Thereafter, the combined resistance value of 12, 13, and 14 is measured and the resistance value of the part 16 is measured at the lowest value necessary for functional modification of the electrical characteristics, and cutting is performed. Next, by modifying the functions, the part 16 in the middle) figure is roughly adjusted and finely adjusted. In this case, the coarse adjustment and fine adjustment are determined by the specific resistance at the time of resistor formation and the pattern formation method. In the embodiment, a case is shown in which two function modifying resistors are arranged in parallel, but this is not intended to be limiting. Depending on the precision required by the characteristics, there may be one or more, or they may be formed in series. Furthermore, although the resistor for resistance value cutting is shown as being connected in series with the function modifying resistor, it may also be connected in parallel, or it may be formed in a combination of series and parallel.

Effects of the Invention As is clear from the above-mentioned embodiments, the present invention cuts and smells the minimum resistance value required for the function correction before the function correction, thereby shortening the function correction time and improving the function. This has the effect of suppressing characteristic fluctuations after correction and enabling highly accurate function correction.

[Brief explanation of drawings]

FIG. 1 is a formation diagram and a modified diagram of a resistance block according to an embodiment of the present invention, and FIG. 2 is a construction diagram and a modification diagram of a resistance block according to a conventional example. 1.11... Printed conductor, 2, 3, 12, 13° 14... Printed resistor, 16... Cutting part due to resistance value correction. 6... Cutting part due to functional modification.

Claims (1)

[Claims] A hybrid integrated circuit characterized in that the combined resistance value of a plurality of unmodified resistor blocks provided for adjusting the function of electrical characteristics is adjusted to the minimum value necessary for correction by the combined resistance value before the function adjustment. Method of forming and modifying resistance of the device.