JPH0361983B2 - - Google Patents

Info

Publication number
JPH0361983B2
JPH0361983B2 JP60221249A JP22124985A JPH0361983B2 JP H0361983 B2 JPH0361983 B2 JP H0361983B2 JP 60221249 A JP60221249 A JP 60221249A JP 22124985 A JP22124985 A JP 22124985A JP H0361983 B2 JPH0361983 B2 JP H0361983B2
Authority
JP
Japan
Prior art keywords
ion
energy
ion beam
sample
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60221249A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6282634A (ja
Inventor
Yoshiro Shiokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP60221249A priority Critical patent/JPS6282634A/ja
Publication of JPS6282634A publication Critical patent/JPS6282634A/ja
Publication of JPH0361983B2 publication Critical patent/JPH0361983B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP60221249A 1985-10-04 1985-10-04 元素分析装置 Granted JPS6282634A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60221249A JPS6282634A (ja) 1985-10-04 1985-10-04 元素分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60221249A JPS6282634A (ja) 1985-10-04 1985-10-04 元素分析装置

Publications (2)

Publication Number Publication Date
JPS6282634A JPS6282634A (ja) 1987-04-16
JPH0361983B2 true JPH0361983B2 (cg-RX-API-DMAC10.html) 1991-09-24

Family

ID=16763807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60221249A Granted JPS6282634A (ja) 1985-10-04 1985-10-04 元素分析装置

Country Status (1)

Country Link
JP (1) JPS6282634A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0640477B2 (ja) * 1989-05-17 1994-05-25 株式会社神戸製鋼所 集束イオンビーム装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157943A (ja) * 1983-02-25 1984-09-07 Hitachi Ltd 分子二次イオン質量分析計

Also Published As

Publication number Publication date
JPS6282634A (ja) 1987-04-16

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