JPS6282634A - 元素分析装置 - Google Patents

元素分析装置

Info

Publication number
JPS6282634A
JPS6282634A JP60221249A JP22124985A JPS6282634A JP S6282634 A JPS6282634 A JP S6282634A JP 60221249 A JP60221249 A JP 60221249A JP 22124985 A JP22124985 A JP 22124985A JP S6282634 A JPS6282634 A JP S6282634A
Authority
JP
Japan
Prior art keywords
energy
ion
ion beam
ions
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60221249A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0361983B2 (cg-RX-API-DMAC10.html
Inventor
Yoshiro Shiokawa
善郎 塩川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP60221249A priority Critical patent/JPS6282634A/ja
Publication of JPS6282634A publication Critical patent/JPS6282634A/ja
Publication of JPH0361983B2 publication Critical patent/JPH0361983B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP60221249A 1985-10-04 1985-10-04 元素分析装置 Granted JPS6282634A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60221249A JPS6282634A (ja) 1985-10-04 1985-10-04 元素分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60221249A JPS6282634A (ja) 1985-10-04 1985-10-04 元素分析装置

Publications (2)

Publication Number Publication Date
JPS6282634A true JPS6282634A (ja) 1987-04-16
JPH0361983B2 JPH0361983B2 (cg-RX-API-DMAC10.html) 1991-09-24

Family

ID=16763807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60221249A Granted JPS6282634A (ja) 1985-10-04 1985-10-04 元素分析装置

Country Status (1)

Country Link
JP (1) JPS6282634A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0374037A (ja) * 1989-05-17 1991-03-28 Kobe Steel Ltd 集束イオンビーム装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157943A (ja) * 1983-02-25 1984-09-07 Hitachi Ltd 分子二次イオン質量分析計

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157943A (ja) * 1983-02-25 1984-09-07 Hitachi Ltd 分子二次イオン質量分析計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0374037A (ja) * 1989-05-17 1991-03-28 Kobe Steel Ltd 集束イオンビーム装置

Also Published As

Publication number Publication date
JPH0361983B2 (cg-RX-API-DMAC10.html) 1991-09-24

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