JPH0361632B2 - - Google Patents

Info

Publication number
JPH0361632B2
JPH0361632B2 JP336585A JP336585A JPH0361632B2 JP H0361632 B2 JPH0361632 B2 JP H0361632B2 JP 336585 A JP336585 A JP 336585A JP 336585 A JP336585 A JP 336585A JP H0361632 B2 JPH0361632 B2 JP H0361632B2
Authority
JP
Japan
Prior art keywords
susceptor
lifting platform
holder
vapor phase
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP336585A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61163193A (ja
Inventor
Kazuo Kamyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP336585A priority Critical patent/JPS61163193A/ja
Publication of JPS61163193A publication Critical patent/JPS61163193A/ja
Publication of JPH0361632B2 publication Critical patent/JPH0361632B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP336585A 1985-01-14 1985-01-14 縦型エピタキシヤル気相成長装置 Granted JPS61163193A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP336585A JPS61163193A (ja) 1985-01-14 1985-01-14 縦型エピタキシヤル気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP336585A JPS61163193A (ja) 1985-01-14 1985-01-14 縦型エピタキシヤル気相成長装置

Publications (2)

Publication Number Publication Date
JPS61163193A JPS61163193A (ja) 1986-07-23
JPH0361632B2 true JPH0361632B2 (enrdf_load_stackoverflow) 1991-09-20

Family

ID=11555317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP336585A Granted JPS61163193A (ja) 1985-01-14 1985-01-14 縦型エピタキシヤル気相成長装置

Country Status (1)

Country Link
JP (1) JPS61163193A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61163193A (ja) 1986-07-23

Similar Documents

Publication Publication Date Title
JP3183575B2 (ja) 処理装置および処理方法
EP0940484A1 (en) Single crystal pulling apparatus
JP2640683B2 (ja) 単結晶棒の引上げ装置
JPS62260791A (ja) シリコン単結晶引上装置
JPH0361632B2 (enrdf_load_stackoverflow)
JP3158328B2 (ja) 単結晶引上装置用原料組み込み方法及び装置
JP3555326B2 (ja) 単結晶引上装置の保持台へのルツボの組み付け方法と、その方法に用いられる保持台組み立て装置、および保持台
JP3122883B2 (ja) 気相成長装置
JP2519459B2 (ja) 単結晶引上装置
JPH09208383A (ja) 単結晶育成装置
JPH0323286A (ja) 単結晶育成装置
JPS63133519A (ja) インナ−ベルジヤ取付治具
JP2733517B2 (ja) 熱処理装置及びそのチューブ取付方法並びにそれに用いる治具
JPH0747520B2 (ja) 単結晶引き上げ装置
JP4020066B2 (ja) 単結晶引上装置
JP3678472B2 (ja) 石英ルツボ移載装置
JPH0754290Y2 (ja) 単結晶の製造装置
JP2902132B2 (ja) 試験槽の密閉装置
JPS61161711A (ja) 半導体の熱処理方法及び熱処理装置
JP2853494B2 (ja) フレコンバッグ装着装置
JPS61171119A (ja) 成膜装置
JPH077329Y2 (ja) 分子線エピタキシー装置
JPH07291784A (ja) 単結晶製造装置
JPH064585Y2 (ja) 半導体ウエハの処理装置
JPS6195512A (ja) Ｃｖｄ装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term