JPH0361163B2 - - Google Patents
Info
- Publication number
- JPH0361163B2 JPH0361163B2 JP48035570A JP3557073A JPH0361163B2 JP H0361163 B2 JPH0361163 B2 JP H0361163B2 JP 48035570 A JP48035570 A JP 48035570A JP 3557073 A JP3557073 A JP 3557073A JP H0361163 B2 JPH0361163 B2 JP H0361163B2
- Authority
- JP
- Japan
- Prior art keywords
- coating
- glass
- refractive index
- glass coating
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011521 glass Substances 0.000 claims description 65
- 239000000758 substrate Substances 0.000 claims description 55
- 238000000576 coating method Methods 0.000 claims description 48
- 239000011248 coating agent Substances 0.000 claims description 46
- 230000003287 optical effect Effects 0.000 claims description 46
- 238000005253 cladding Methods 0.000 claims description 4
- 239000005357 flat glass Substances 0.000 claims description 2
- 230000000644 propagated effect Effects 0.000 claims description 2
- 239000011247 coating layer Substances 0.000 description 50
- 239000010410 layer Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 16
- 239000004071 soot Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 12
- 239000002245 particle Substances 0.000 description 12
- 238000000151 deposition Methods 0.000 description 11
- 230000007062 hydrolysis Effects 0.000 description 11
- 238000006460 hydrolysis reaction Methods 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 239000000203 mixture Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000000654 additive Substances 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 230000008021 deposition Effects 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 239000005350 fused silica glass Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 229910003902 SiCl 4 Inorganic materials 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910003910 SiCl4 Inorganic materials 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 238000000149 argon plasma sintering Methods 0.000 description 3
- 239000006121 base glass Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 239000006060 molten glass Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910003074 TiCl4 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optical Integrated Circuits (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23974572A | 1972-03-30 | 1972-03-30 | |
| US00239701A US3806223A (en) | 1972-03-30 | 1972-03-30 | Planar optical waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4910054A JPS4910054A (en, 2012) | 1974-01-29 |
| JPH0361163B2 true JPH0361163B2 (en, 2012) | 1991-09-19 |
Family
ID=26932775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48035570A Expired - Lifetime JPH0361163B2 (en, 2012) | 1972-03-30 | 1973-03-28 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPH0361163B2 (en, 2012) |
| DE (1) | DE2313202C2 (en, 2012) |
| FR (1) | FR2178176B1 (en, 2012) |
| GB (1) | GB1421401A (en, 2012) |
| NL (1) | NL7304380A (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012508685A (ja) * | 2008-11-13 | 2012-04-12 | コーニング インコーポレイテッド | 照射によりコージエライトガラス体を製造する方法およびそれにより得られたガラス体 |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH553428A (de) * | 1970-09-04 | 1974-08-30 | Ciba Geigy Ag | Verwendung von chinoxalinen als wasserstoffuebertraeger. |
| JPS5342051A (en) * | 1976-09-28 | 1978-04-17 | Nippon Telegr & Teleph Corp <Ntt> | Light wave guide |
| JPS5370839A (en) * | 1976-12-07 | 1978-06-23 | Fujitsu Ltd | Production of optical wave guide circuit |
| JPS5371845A (en) * | 1976-12-08 | 1978-06-26 | Nippon Telegr & Teleph Corp <Ntt> | Optical wave guide thin film and its production |
| JPS5753701A (en) * | 1980-09-16 | 1982-03-30 | Nippon Telegr & Teleph Corp <Ntt> | Volume lens |
| JPS57132137U (en, 2012) * | 1981-02-10 | 1982-08-17 | ||
| DK147064C (da) * | 1981-10-15 | 1984-10-22 | Int Ostomy Products Aps | Ventilationsaggregat til stomipose |
| FR2534034B1 (fr) * | 1982-10-05 | 1986-02-28 | Lyonnaise Transmiss Optiques | Guide d'ondes lumineuses, et procedes de fabrication de celui-ci |
| JPS61158303A (ja) * | 1984-12-29 | 1986-07-18 | Furukawa Electric Co Ltd:The | 石英系光導波路の形成方法 |
| GB8523433D0 (en) * | 1985-09-23 | 1985-10-30 | Gen Electric Co Plc | Channel waveguides |
| DE3543002A1 (de) * | 1985-12-05 | 1987-06-11 | Bodenseewerk Geraetetech | Verfahren zur herstellung von integriert-optischen strukturen in glas |
| GB8603119D0 (en) * | 1986-02-07 | 1986-03-12 | Gen Electric Co Plc | Optical channel waveguides |
| CN108817686A (zh) * | 2018-07-03 | 2018-11-16 | 京东方科技集团股份有限公司 | 基板承载台及切割装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3386787A (en) * | 1963-10-25 | 1968-06-04 | Hazeltine Research Inc | Macroscopic optical waveguides |
| SE346873B (en, 2012) * | 1968-05-17 | 1972-07-17 | Western Electric Co | |
| CA951555A (en) * | 1970-05-11 | 1974-07-23 | Robert D. Maurer | Glass optical waveguide |
-
1973
- 1973-03-16 DE DE19732313202 patent/DE2313202C2/de not_active Expired
- 1973-03-28 JP JP48035570A patent/JPH0361163B2/ja not_active Expired - Lifetime
- 1973-03-29 GB GB1526373A patent/GB1421401A/en not_active Expired
- 1973-03-29 FR FR7311332A patent/FR2178176B1/fr not_active Expired
- 1973-03-29 NL NL7304380A patent/NL7304380A/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012508685A (ja) * | 2008-11-13 | 2012-04-12 | コーニング インコーポレイテッド | 照射によりコージエライトガラス体を製造する方法およびそれにより得られたガラス体 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2313202C2 (de) | 1985-09-05 |
| JPS4910054A (en, 2012) | 1974-01-29 |
| DE2313202A1 (de) | 1973-10-11 |
| GB1421401A (en) | 1976-01-21 |
| NL7304380A (en, 2012) | 1973-10-02 |
| FR2178176B1 (en, 2012) | 1976-06-11 |
| FR2178176A1 (en, 2012) | 1973-11-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 19810825 |