JPS5371845A - Optical wave guide thin film and its production - Google Patents
Optical wave guide thin film and its productionInfo
- Publication number
- JPS5371845A JPS5371845A JP14659476A JP14659476A JPS5371845A JP S5371845 A JPS5371845 A JP S5371845A JP 14659476 A JP14659476 A JP 14659476A JP 14659476 A JP14659476 A JP 14659476A JP S5371845 A JPS5371845 A JP S5371845A
- Authority
- JP
- Japan
- Prior art keywords
- production
- thin film
- wave guide
- optical wave
- guide thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
PURPOSE:To additionally widen the control range of refractive indices and sufficiently lower propagation loss by selecting SiO2-Ta2O5 base as a target material and using a sputter method which is superior in terms of ease of controlling film thickness and operating processes as an operation method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14659476A JPS5371845A (en) | 1976-12-08 | 1976-12-08 | Optical wave guide thin film and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14659476A JPS5371845A (en) | 1976-12-08 | 1976-12-08 | Optical wave guide thin film and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5371845A true JPS5371845A (en) | 1978-06-26 |
Family
ID=15411236
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14659476A Pending JPS5371845A (en) | 1976-12-08 | 1976-12-08 | Optical wave guide thin film and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5371845A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8385706B2 (en) | 2005-01-31 | 2013-02-26 | Osram Opto Semiconductors Gmbh | Optical element and method for the production thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4856437A (en) * | 1971-11-16 | 1973-08-08 | ||
JPS4910054A (en) * | 1972-03-30 | 1974-01-29 |
-
1976
- 1976-12-08 JP JP14659476A patent/JPS5371845A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4856437A (en) * | 1971-11-16 | 1973-08-08 | ||
JPS4910054A (en) * | 1972-03-30 | 1974-01-29 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8385706B2 (en) | 2005-01-31 | 2013-02-26 | Osram Opto Semiconductors Gmbh | Optical element and method for the production thereof |
US8509583B2 (en) | 2005-01-31 | 2013-08-13 | Osram Opto Semiconductors Gmbh | Optical element and method for the production thereof |
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