JPS5371845A - Optical wave guide thin film and its production - Google Patents

Optical wave guide thin film and its production

Info

Publication number
JPS5371845A
JPS5371845A JP14659476A JP14659476A JPS5371845A JP S5371845 A JPS5371845 A JP S5371845A JP 14659476 A JP14659476 A JP 14659476A JP 14659476 A JP14659476 A JP 14659476A JP S5371845 A JPS5371845 A JP S5371845A
Authority
JP
Japan
Prior art keywords
production
thin film
wave guide
optical wave
guide thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14659476A
Other languages
Japanese (ja)
Inventor
Hiroshi Terui
Morio Kobayashi
Kazumichi Egashira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP14659476A priority Critical patent/JPS5371845A/en
Publication of JPS5371845A publication Critical patent/JPS5371845A/en
Pending legal-status Critical Current

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  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To additionally widen the control range of refractive indices and sufficiently lower propagation loss by selecting SiO2-Ta2O5 base as a target material and using a sputter method which is superior in terms of ease of controlling film thickness and operating processes as an operation method.
JP14659476A 1976-12-08 1976-12-08 Optical wave guide thin film and its production Pending JPS5371845A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14659476A JPS5371845A (en) 1976-12-08 1976-12-08 Optical wave guide thin film and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14659476A JPS5371845A (en) 1976-12-08 1976-12-08 Optical wave guide thin film and its production

Publications (1)

Publication Number Publication Date
JPS5371845A true JPS5371845A (en) 1978-06-26

Family

ID=15411236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14659476A Pending JPS5371845A (en) 1976-12-08 1976-12-08 Optical wave guide thin film and its production

Country Status (1)

Country Link
JP (1) JPS5371845A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8385706B2 (en) 2005-01-31 2013-02-26 Osram Opto Semiconductors Gmbh Optical element and method for the production thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4856437A (en) * 1971-11-16 1973-08-08
JPS4910054A (en) * 1972-03-30 1974-01-29

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4856437A (en) * 1971-11-16 1973-08-08
JPS4910054A (en) * 1972-03-30 1974-01-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8385706B2 (en) 2005-01-31 2013-02-26 Osram Opto Semiconductors Gmbh Optical element and method for the production thereof
US8509583B2 (en) 2005-01-31 2013-08-13 Osram Opto Semiconductors Gmbh Optical element and method for the production thereof

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