JPH0360364B2 - - Google Patents

Info

Publication number
JPH0360364B2
JPH0360364B2 JP16866984A JP16866984A JPH0360364B2 JP H0360364 B2 JPH0360364 B2 JP H0360364B2 JP 16866984 A JP16866984 A JP 16866984A JP 16866984 A JP16866984 A JP 16866984A JP H0360364 B2 JPH0360364 B2 JP H0360364B2
Authority
JP
Japan
Prior art keywords
stylus
holder
diaphragm
piezoelectric element
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16866984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6145903A (ja
Inventor
Minoru Fukuyoshi
Takashi Koto
Tetsuo Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP16866984A priority Critical patent/JPS6145903A/ja
Publication of JPS6145903A publication Critical patent/JPS6145903A/ja
Publication of JPH0360364B2 publication Critical patent/JPH0360364B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP16866984A 1984-08-10 1984-08-10 タツチ信号プロ−ブ Granted JPS6145903A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16866984A JPS6145903A (ja) 1984-08-10 1984-08-10 タツチ信号プロ−ブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16866984A JPS6145903A (ja) 1984-08-10 1984-08-10 タツチ信号プロ−ブ

Publications (2)

Publication Number Publication Date
JPS6145903A JPS6145903A (ja) 1986-03-06
JPH0360364B2 true JPH0360364B2 (enrdf_load_stackoverflow) 1991-09-13

Family

ID=15872296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16866984A Granted JPS6145903A (ja) 1984-08-10 1984-08-10 タツチ信号プロ−ブ

Country Status (1)

Country Link
JP (1) JPS6145903A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6145903A (ja) 1986-03-06

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