JPH0358855B2 - - Google Patents
Info
- Publication number
- JPH0358855B2 JPH0358855B2 JP59204821A JP20482184A JPH0358855B2 JP H0358855 B2 JPH0358855 B2 JP H0358855B2 JP 59204821 A JP59204821 A JP 59204821A JP 20482184 A JP20482184 A JP 20482184A JP H0358855 B2 JPH0358855 B2 JP H0358855B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- members
- drive
- fixed
- fine movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59204821A JPS6182433A (ja) | 1984-09-29 | 1984-09-29 | 微動機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59204821A JPS6182433A (ja) | 1984-09-29 | 1984-09-29 | 微動機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6182433A JPS6182433A (ja) | 1986-04-26 |
| JPH0358855B2 true JPH0358855B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-09-06 |
Family
ID=16496938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59204821A Granted JPS6182433A (ja) | 1984-09-29 | 1984-09-29 | 微動機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6182433A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH064209B2 (ja) * | 1987-10-06 | 1994-01-19 | 日本電気株式会社 | 位置決め機構 |
| JPH064210B2 (ja) * | 1987-10-20 | 1994-01-19 | 日本電気株式会社 | 位置決め機構 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55157451A (en) * | 1979-05-21 | 1980-12-08 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Positioning device |
| JPS58190079A (ja) * | 1982-04-28 | 1983-11-05 | Toshiba Corp | 微動機構 |
-
1984
- 1984-09-29 JP JP59204821A patent/JPS6182433A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6182433A (ja) | 1986-04-26 |