JPH035804Y2 - - Google Patents
Info
- Publication number
- JPH035804Y2 JPH035804Y2 JP1985022537U JP2253785U JPH035804Y2 JP H035804 Y2 JPH035804 Y2 JP H035804Y2 JP 1985022537 U JP1985022537 U JP 1985022537U JP 2253785 U JP2253785 U JP 2253785U JP H035804 Y2 JPH035804 Y2 JP H035804Y2
- Authority
- JP
- Japan
- Prior art keywords
- environment
- clean bench
- clean
- supply chamber
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985022537U JPH035804Y2 (h) | 1985-02-21 | 1985-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985022537U JPH035804Y2 (h) | 1985-02-21 | 1985-02-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61141642U JPS61141642U (h) | 1986-09-02 |
| JPH035804Y2 true JPH035804Y2 (h) | 1991-02-14 |
Family
ID=30514922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985022537U Expired JPH035804Y2 (h) | 1985-02-21 | 1985-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH035804Y2 (h) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48106587U (h) * | 1972-03-13 | 1973-12-11 | ||
| JPS57131817U (h) * | 1981-02-13 | 1982-08-17 |
-
1985
- 1985-02-21 JP JP1985022537U patent/JPH035804Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61141642U (h) | 1986-09-02 |
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