JPH0357080B2 - - Google Patents
Info
- Publication number
- JPH0357080B2 JPH0357080B2 JP59264784A JP26478484A JPH0357080B2 JP H0357080 B2 JPH0357080 B2 JP H0357080B2 JP 59264784 A JP59264784 A JP 59264784A JP 26478484 A JP26478484 A JP 26478484A JP H0357080 B2 JPH0357080 B2 JP H0357080B2
- Authority
- JP
- Japan
- Prior art keywords
- gold
- electrode
- single crystal
- electrodes
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 39
- 229910052737 gold Inorganic materials 0.000 claims description 33
- 239000010931 gold Substances 0.000 claims description 33
- 239000013078 crystal Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 16
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 10
- 238000007747 plating Methods 0.000 claims description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 19
- 229910052697 platinum Inorganic materials 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、タンタル酸リチウム単結晶の単一分
域化方法に関するものであり、特には金板、金
線、金メツキ膜または金蒸着膜からなる電極を用
いることにより電極面に着色物の付着をともなう
ことなく、能率よく単一分域化を行う方法に関す
る。Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a method for forming a lithium tantalate single crystal into a single domain, and particularly relates to a method for forming a lithium tantalate single crystal into a single domain. The present invention relates to a method for efficiently dividing into a single domain without adhesion of colored substances to the electrode surface by using an electrode consisting of the following.
（従来の技術）
従来、チヨクラルスキー法によるＸ軸引上げタ
ンタル酸リチウム単結晶を単一分域化する方法と
しては、引上げ単結晶の側面すなわちＺ軸方向の
面にたとえば帯状の形状をした正負電極を単結晶
を挟むようにして対向配置し、キユーリー温度以
上一般には610℃以上の温度に加熱しながら両電
極間に電圧を印加することにより単一分域化する
方法が知られている。この方法において電極とし
てはもつぱり白金（Pt）が使用されているので
あるが白金電極を使用すると白金電極の結晶側表
面に異物（着色物）が付着形成し、接触抵抗損と
なるのでこれを除去することが必要であり、単一
分域化の作業が非能率的であつた。(Prior art) Conventionally, as a method for dividing an X-axis pulled lithium tantalate single crystal into a single domain by the Czyochralski method, a band-shaped positive and negative A method is known in which electrodes are placed facing each other so as to sandwich a single crystal, and a voltage is applied between the two electrodes while heating the single crystal to a temperature higher than the Curie temperature, generally 610° C. or higher, thereby forming a single domain. In this method, platinum (Pt) is used as the electrode, but if a platinum electrode is used, foreign matter (colored matter) will adhere and form on the crystal side surface of the platinum electrode, resulting in contact resistance loss. It was necessary to remove the area, and the task of dividing into a single area was inefficient.
（発明の構成）
本発明者らはかかる従来の問題点にかんがみ鋭
意研究した結果、電極として金板、金線、金メツ
キ膜または金蒸着膜からなるものを使用すれば異
物（着色物）の付着形成がなく、しかも白金電極
の場合にみられる結晶体中への電極材料の拡散と
いう問題点も、金電極の場合には起らないことを
確認し本発明を完成した。(Structure of the Invention) As a result of intensive research in view of the above conventional problems, the present inventors have found that if an electrode made of a gold plate, gold wire, gold plating film or gold vapor deposited film is used, foreign matter (colored matter) can be removed. The present invention was completed by confirming that there is no adhesion formation, and that the problem of diffusion of electrode material into crystals that occurs with platinum electrodes does not occur in the case of gold electrodes.
すなわち本発明は、チヨクラルスキー法引上げ
タンタル酸リチウム単結晶の側面に金板、金線、
金メツキ膜または金蒸着膜を用いたものからなる
正負電極を対向して形成し、両電極間に電圧を印
加して単一分域化することを特徴とするタンタル
酸リチウム単結晶の単一分域化方法に関するもの
である。 That is, the present invention provides a technique for attaching a gold plate, a gold wire,
A single lithium tantalate single crystal characterized by forming positive and negative electrodes made of a gold-plated film or a gold vapor-deposited film facing each other and forming a single domain by applying a voltage between the two electrodes. This relates to the regionalization method.
本発明に使用される電極は金板、金線、銅など
の基板面に金メツキ膜または金蒸着膜を形成した
ものとされるが、その電極の形態について例示す
れば第１図イ〜ニに示すとおりである。すなわち
第１図イ〜ロは板状電極を示したものであり、イ
図は厚さは0.05〜１mm付近の金電極１、ロ図は、
銅等の基板２の表面に金メツキ膜または金蒸着膜
３を形成した電極である。 The electrode used in the present invention is said to have a gold plating film or a gold vapor deposited film formed on the surface of a substrate such as a gold plate, gold wire, or copper. As shown below. That is, Figure 1 A to B show plate-shaped electrodes, where A is a gold electrode 1 with a thickness of around 0.05 to 1 mm, and B is a gold electrode 1 with a thickness of around 0.05 to 1 mm.
This electrode has a gold plating film or a gold vapor deposited film 3 formed on the surface of a substrate 2 made of copper or the like.
さらにハ図は金メツシユ電極４、ニ図は金フエ
ルト電極５を示したものであり、ハ図の金メツシ
ユを構成する金線として0.1mm径付近のものが使
用される。なお、この場合目幅については特に制
限はないが通常は１mm以下であることが望まし
い。ニ図の金フエルト５を構成する金線としては
0.01〜0.1mm径付近のもが使用され、フエルトの
厚さは通常１mm以下で充分である。 Further, Fig. C shows a gold mesh electrode 4, and Fig. D shows a gold felt electrode 5. The gold wire constituting the gold mesh in Fig. C is about 0.1 mm in diameter. In this case, there is no particular restriction on the eye width, but it is usually desirable that it be 1 mm or less. The gold wire that makes up the gold felt 5 in Figure 2 is
A felt with a diameter of around 0.01 to 0.1 mm is used, and a felt thickness of 1 mm or less is usually sufficient.
以上例示した各図の電極を構成する金材質につ
いては金のみに限定されるものでなく、これには
金と銅もしくは銀等との合金からなる材質のもの
も使用することができる。 The gold material constituting the electrodes in the figures illustrated above is not limited to gold alone, and may also be made of an alloy of gold and copper, silver, or the like.
第２図はチヨクラルスキー法で引上げたタンタ
ル酸リチウム単結晶を単一分域化するために、そ
の単結晶の側面に帯状電極（板状電極）を設置し
た状態を示す概略斜視図である。同図において１
０は単結晶であり、１１はそれを支えるためのア
ルミナ台、１２は帯状電極である。単一分域化を
良好に行わせるために、単結晶１０と帯状電極１
２間には通常タンタル酸リチウム単結晶等の粉体
をペースト状とした充填物１３を介在させる。な
お、同図中１４は電極板をおさえるためのバンド
である。 Figure 2 is a schematic perspective view showing a state in which a strip electrode (plate electrode) is installed on the side of a lithium tantalate single crystal pulled by the Czyochralski method in order to separate it into a single domain. . In the same figure, 1
0 is a single crystal, 11 is an alumina stand for supporting it, and 12 is a strip electrode. In order to achieve good single segmentation, a single crystal 10 and a strip electrode 1 are used.
A filler 13 made of paste-like powder such as lithium tantalate single crystal is usually interposed between the two. Note that 14 in the figure is a band for holding down the electrode plate.
上記のようにして正負電極を設置し、加熱炉中
で所定温度に加熱しながら両電極間に電圧を印加
することにより単一分域化（ポーリング）を行
う。 The positive and negative electrodes are installed as described above, and a voltage is applied between both electrodes while heating to a predetermined temperature in a heating furnace, thereby performing single segmentation (poling).
本発明の金電極を用いる方法によれば、該金電
極の表面（結晶側表面）に異物（着色物）の付着
形成がないので、白金電極の場合のような単一分
域化の操作毎に電極表面の着色物を除去する煩雑
な作業が回避され、したがつて単一分域化の作業
能率がきわめてよいという利点が与えられる。ま
た白金電極の場合には単一分域化の操作時に電極
材料が単結晶中に拡散する傾向が認められ、問題
となつていたのであるが、本発明の金電極を用い
る方法の場合にはかかる拡散の問題は認められな
い。 According to the method using the gold electrode of the present invention, there is no adhesion of foreign matter (colored matter) on the surface of the gold electrode (crystal side surface), so it is necessary to perform the single-domain operation as in the case of platinum electrodes. The troublesome work of removing colored matter from the electrode surface is avoided, and the advantage is that the work efficiency of single-segmentation is extremely high. In addition, in the case of platinum electrodes, there was a tendency for the electrode material to diffuse into the single crystal during the single-segmentation operation, which was a problem, but in the case of the method using the gold electrodes of the present invention, Such a diffusion problem is not recognized.
なお、本発明の方法を実施するに当つての、結
晶体側面における電極の設置条件、加熱温度条
件、電圧印加条件等については従来と同様でよ
く、特別の条件を採用する必要はない。 In carrying out the method of the present invention, the conditions for installing electrodes on the side surfaces of the crystal, heating temperature conditions, voltage application conditions, etc. may be the same as conventional ones, and there is no need to adopt special conditions.
つぎに具体的実施例をあげる。 Next, specific examples will be given.
実施例
チヨクラルスキー法で製造したＸ軸引上げタン
タル酸リチウム単結晶（直径80mm長さ110mm）の
Ｚ軸方向の側面に、第１図イに示す形状の金材質
からなる板状電極を第２図に示すように設置し、
加熱炉中で630℃の温度に加熱しながら90Vの電
圧を印加してポーリングを行つた。Example A second plate-shaped electrode made of gold material having the shape shown in Fig. 1A was attached to the side surface in the Z-axis direction of an Install as shown in the diagram,
Poling was performed by applying a voltage of 90V while heating the sample to a temperature of 630°C in a heating furnace.
この結果、結晶内への金の拡散現象は認められ
ず、また電極の結晶体側の面は第３図イに示すよ
うに、着色物・異物の形成がなく、きれいな状態
であり、次の作業に支障なく再使用できた。な
お、結晶体は完全にポーリングされていた。 As a result, no diffusion of gold into the crystal was observed, and the surface of the electrode on the crystal side was in a clean state with no colored or foreign matter formed, as shown in Figure 3A. It could be reused without any problems. Note that the crystal was completely polled.
他方比較のために、上記金材質からなる板状電
極の代りに白金材料からなる同形の電極を用いた
ほかは同様にしてポーリングを行つたところ、結
晶内への白金の拡散現象が起こり、また電極の結
晶体側の面は第３図ロに示すように着色物・異物
の形成が認められた。この電極面の着色物・異物
を取除くのにてまひまがかかり作業能率が阻害さ
れた。またポーリングされた結晶体は内部に白金
が拡散しており品質に劣るものであつた。 On the other hand, for comparison, when poling was carried out in the same manner except that an electrode of the same shape made of platinum material was used instead of the plate-shaped electrode made of gold material, a phenomenon of diffusion of platinum into the crystal occurred, and As shown in FIG. 3B, formation of colored matter and foreign matter was observed on the crystal side surface of the electrode. It took some time to remove the colored matter and foreign matter from the electrode surface, which hindered work efficiency. In addition, the polled crystal had platinum diffused inside and was of poor quality.
第１図イ，ロ，ハおよびニは金材質からなる電
極をそれぞれ例示したものであり、第２図はタン
タル酸リチウム単結晶の側面に板状の正負電極を
設置した概略斜視図を示したものである。さらに
第３図イ，ロは単結晶をポーリングするために使
用した後の電極の結晶体側の面をそれぞれ示した
ものである。
１……板状電極、２……基板、３……金メツキ
膜または金蒸着膜、４……金メツシユ電極、５…
…金フエルト電極、１０……単結晶、１１……ア
ルミナ台、１２……電極、１３……充填物、１４
……バンド。
Figure 1 A, B, C, and D respectively illustrate electrodes made of gold material, and Figure 2 is a schematic perspective view of plate-shaped positive and negative electrodes installed on the sides of a lithium tantalate single crystal. It is something. Furthermore, FIGS. 3A and 3B respectively show the crystal-side surface of the electrode after it has been used to poll the single crystal. DESCRIPTION OF SYMBOLS 1...Plate electrode, 2...Substrate, 3...Gold plating film or gold evaporation film, 4...Gold mesh electrode, 5...
...Gold felt electrode, 10...Single crystal, 11...Alumina stand, 12...Electrode, 13...Filling, 14
……band.
Claims (1)
ム単結晶の側面に金板、金線、金メツキ膜または
金蒸着膜を用いたものからなる正負電極を対向し
て形成し、両電極間に電圧を印加して単一分域化
することを特徴とするタンタル酸リチウム単結晶
の単一分域化方法。1 Positive and negative electrodes made of a gold plate, gold wire, gold plating film, or gold evaporated film are formed facing each other on the sides of a lithium tantalate single crystal pulled by the Czyochralski method, and a voltage is applied between the two electrodes. 1. A method for single-domaining a lithium tantalate single crystal, the method comprising: forming a lithium tantalate single crystal into a single domain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26478484A JPS61146796A (en) | 1984-12-14 | 1984-12-14 | Method for making lithium tantalate single crystal into single domain |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26478484A JPS61146796A (en) | 1984-12-14 | 1984-12-14 | Method for making lithium tantalate single crystal into single domain |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61146796A JPS61146796A (en) | 1986-07-04 |
| JPH0357080B2 true JPH0357080B2 (en) | 1991-08-30 |
Family
ID=17408144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26478484A Granted JPS61146796A (en) | 1984-12-14 | 1984-12-14 | Method for making lithium tantalate single crystal into single domain |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61146796A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2502608B2 (en) * | 1987-07-20 | 1996-05-29 | 信越化学工業株式会社 | Method for producing single-domain lithium tantalate single crystal |
| ATE164236T1 (en) * | 1989-02-01 | 1998-04-15 | Univ Leland Stanford Junior | METHOD FOR CONTROLLING AREAS OF FERROELECTRIC POLARIZATION AREAS IN SOLID BODY |
| KR20040088448A (en) | 2004-09-21 | 2004-10-16 | 정세영 | manufacturing method for single crystal wire |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5365299A (en) * | 1976-11-25 | 1978-06-10 | Toshiba Corp | Production of single crystal of lithium tantalate extended singleorientation zone |
-
1984
- 1984-12-14 JP JP26478484A patent/JPS61146796A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5365299A (en) * | 1976-11-25 | 1978-06-10 | Toshiba Corp | Production of single crystal of lithium tantalate extended singleorientation zone |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61146796A (en) | 1986-07-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |