JPH0355076Y2 - - Google Patents

Info

Publication number
JPH0355076Y2
JPH0355076Y2 JP1983050468U JP5046883U JPH0355076Y2 JP H0355076 Y2 JPH0355076 Y2 JP H0355076Y2 JP 1983050468 U JP1983050468 U JP 1983050468U JP 5046883 U JP5046883 U JP 5046883U JP H0355076 Y2 JPH0355076 Y2 JP H0355076Y2
Authority
JP
Japan
Prior art keywords
silicon diaphragm
piezoresistor
thin film
thin
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983050468U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59155530U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5046883U priority Critical patent/JPS59155530U/ja
Publication of JPS59155530U publication Critical patent/JPS59155530U/ja
Application granted granted Critical
Publication of JPH0355076Y2 publication Critical patent/JPH0355076Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP5046883U 1983-04-04 1983-04-04 半導体圧力センサ Granted JPS59155530U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5046883U JPS59155530U (ja) 1983-04-04 1983-04-04 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5046883U JPS59155530U (ja) 1983-04-04 1983-04-04 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS59155530U JPS59155530U (ja) 1984-10-18
JPH0355076Y2 true JPH0355076Y2 (h) 1991-12-06

Family

ID=30180926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5046883U Granted JPS59155530U (ja) 1983-04-04 1983-04-04 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS59155530U (h)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5455474A (en) * 1977-10-12 1979-05-02 Teraoka Seikosho Kk Temperature compensation load meter

Also Published As

Publication number Publication date
JPS59155530U (ja) 1984-10-18

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