JPH0354198B2 - - Google Patents
Info
- Publication number
- JPH0354198B2 JPH0354198B2 JP9717684A JP9717684A JPH0354198B2 JP H0354198 B2 JPH0354198 B2 JP H0354198B2 JP 9717684 A JP9717684 A JP 9717684A JP 9717684 A JP9717684 A JP 9717684A JP H0354198 B2 JPH0354198 B2 JP H0354198B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- amorphous
- irradiation
- charged particles
- micropores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 58
- 239000002245 particle Substances 0.000 claims description 21
- 229910045601 alloy Inorganic materials 0.000 claims description 18
- 239000000956 alloy Substances 0.000 claims description 18
- 239000011148 porous material Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 15
- 239000005300 metallic glass Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 24
- 238000005530 etching Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 14
- 239000012528 membrane Substances 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 10
- 239000007788 liquid Substances 0.000 description 9
- 238000005553 drilling Methods 0.000 description 6
- 238000000926 separation method Methods 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910017060 Fe Cr Inorganic materials 0.000 description 3
- 229910002544 Fe-Cr Inorganic materials 0.000 description 3
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 3
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 3
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013270 controlled release Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005536 corrosion prevention Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000000502 dialysis Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000000909 electrodialysis Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Filtering Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9717684A JPS60243287A (ja) | 1984-05-14 | 1984-05-14 | 多孔質アモルファス金属薄膜並びにその製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9717684A JPS60243287A (ja) | 1984-05-14 | 1984-05-14 | 多孔質アモルファス金属薄膜並びにその製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60243287A JPS60243287A (ja) | 1985-12-03 |
| JPH0354198B2 true JPH0354198B2 (https=) | 1991-08-19 |
Family
ID=14185270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9717684A Granted JPS60243287A (ja) | 1984-05-14 | 1984-05-14 | 多孔質アモルファス金属薄膜並びにその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60243287A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6417878A (en) * | 1987-07-14 | 1989-01-20 | Agency Ind Science Techn | Production of electrode for accelerating heat transmission condensation |
| FR2677271A1 (fr) * | 1991-06-04 | 1992-12-11 | Commissariat Energie Atomique | Procede de realisation de membranes microporeuses. |
| JP5981953B2 (ja) * | 2014-03-10 | 2016-08-31 | 国立大学法人東北大学 | 多孔質金属およびその製造方法並びに電池用電極 |
-
1984
- 1984-05-14 JP JP9717684A patent/JPS60243287A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60243287A (ja) | 1985-12-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH02229530A (ja) | 選択透過膜によるガス、アイソトープおよび液体の透過分離方法 | |
| US20100018852A1 (en) | Process for Producing a Porous Track Membrane | |
| US9518309B2 (en) | Method of manufacturing porous metal foam | |
| EP0234727A1 (en) | Porous anodic aluminium oxide films | |
| US20150148436A1 (en) | Method to Fabricate Functionalized Conical Nanopores | |
| TWI607043B (zh) | 親水性ｐｔｆｅ膜 | |
| JPH0354198B2 (https=) | ||
| Dobrev et al. | Conical etching and electrochemical metal replication of heavy-ion tracks in polymer foils | |
| CN105169963A (zh) | 核径迹蚀刻膜的制作方法 | |
| Kikuchi et al. | Fabrication of micropores and grooves on aluminum by laser irradiation and electrochemical technique | |
| JP2009068076A (ja) | 微細構造体および製造方法 | |
| DE3120086A1 (de) | Verfahren zur herstellung von ultrafiltern | |
| Kuznetsov et al. | Production and investigation of nuclear track membranes at JINR | |
| Kravets et al. | The properties and porous structure of polypropylene track membranes | |
| Kurakhmedov et al. | Asymmetrical track-etched membranes prepared by double-sided irradiation on the DC-60 cyclotron | |
| JPH0338227A (ja) | 多孔性高分子膜の製造方法 | |
| JPH04252237A (ja) | 多孔性高分子膜およびその製造方法 | |
| JPS6171804A (ja) | 多孔性酸化アルミニウム膜 | |
| JPH03267131A (ja) | 多孔性ポリエーテルスルホン膜およびその製造方法 | |
| JPH01262904A (ja) | 濾過膜の製造方法 | |
| Bomko et al. | Production of nano-pore track membranes based on PET films irradiated by Ar ions | |
| CN107849724A (zh) | 多孔材料及系统及其制造方法 | |
| JPS61149472A (ja) | フイルム | |
| EA034696B1 (ru) | Асимметричные трековые мембраны для процесса прямого осмоса | |
| Wang et al. | Micropatterning of alumina tubular membranes via laser carving for enhanced direct air capture |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |