JPH0353166Y2 - - Google Patents

Info

Publication number
JPH0353166Y2
JPH0353166Y2 JP1985001792U JP179285U JPH0353166Y2 JP H0353166 Y2 JPH0353166 Y2 JP H0353166Y2 JP 1985001792 U JP1985001792 U JP 1985001792U JP 179285 U JP179285 U JP 179285U JP H0353166 Y2 JPH0353166 Y2 JP H0353166Y2
Authority
JP
Japan
Prior art keywords
silane
based gas
gas
catalyst
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985001792U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61119758U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985001792U priority Critical patent/JPH0353166Y2/ja
Publication of JPS61119758U publication Critical patent/JPS61119758U/ja
Application granted granted Critical
Publication of JPH0353166Y2 publication Critical patent/JPH0353166Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Emergency Alarm Devices (AREA)
JP1985001792U 1985-01-12 1985-01-12 Expired JPH0353166Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985001792U JPH0353166Y2 (cs) 1985-01-12 1985-01-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985001792U JPH0353166Y2 (cs) 1985-01-12 1985-01-12

Publications (2)

Publication Number Publication Date
JPS61119758U JPS61119758U (cs) 1986-07-28
JPH0353166Y2 true JPH0353166Y2 (cs) 1991-11-20

Family

ID=30474860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985001792U Expired JPH0353166Y2 (cs) 1985-01-12 1985-01-12

Country Status (1)

Country Link
JP (1) JPH0353166Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103080742B (zh) 2010-08-27 2016-01-13 英派尔科技开发有限公司 氢氟烷检测装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554317B2 (cs) * 1972-06-05 1980-01-29
JPS5069985U (cs) * 1973-10-30 1975-06-20
JPS53140089A (en) * 1977-05-13 1978-12-06 Shimadzu Corp Detection of n-nitroso compound

Also Published As

Publication number Publication date
JPS61119758U (cs) 1986-07-28

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