JPH0353165Y2 - - Google Patents

Info

Publication number
JPH0353165Y2
JPH0353165Y2 JP1985001791U JP179185U JPH0353165Y2 JP H0353165 Y2 JPH0353165 Y2 JP H0353165Y2 JP 1985001791 U JP1985001791 U JP 1985001791U JP 179185 U JP179185 U JP 179185U JP H0353165 Y2 JPH0353165 Y2 JP H0353165Y2
Authority
JP
Japan
Prior art keywords
gas
silane
heater
ion chamber
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985001791U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61119757U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985001791U priority Critical patent/JPH0353165Y2/ja
Publication of JPS61119757U publication Critical patent/JPS61119757U/ja
Application granted granted Critical
Publication of JPH0353165Y2 publication Critical patent/JPH0353165Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Emergency Alarm Devices (AREA)
JP1985001791U 1985-01-12 1985-01-12 Expired JPH0353165Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985001791U JPH0353165Y2 (cs) 1985-01-12 1985-01-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985001791U JPH0353165Y2 (cs) 1985-01-12 1985-01-12

Publications (2)

Publication Number Publication Date
JPS61119757U JPS61119757U (cs) 1986-07-28
JPH0353165Y2 true JPH0353165Y2 (cs) 1991-11-20

Family

ID=30474858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985001791U Expired JPH0353165Y2 (cs) 1985-01-12 1985-01-12

Country Status (1)

Country Link
JP (1) JPH0353165Y2 (cs)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS554317B2 (cs) * 1972-06-05 1980-01-29
JPS5069985U (cs) * 1973-10-30 1975-06-20
JPS53140089A (en) * 1977-05-13 1978-12-06 Shimadzu Corp Detection of n-nitroso compound

Also Published As

Publication number Publication date
JPS61119757U (cs) 1986-07-28

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