JPH0352804B2 - - Google Patents
Info
- Publication number
- JPH0352804B2 JPH0352804B2 JP2088584A JP2088584A JPH0352804B2 JP H0352804 B2 JPH0352804 B2 JP H0352804B2 JP 2088584 A JP2088584 A JP 2088584A JP 2088584 A JP2088584 A JP 2088584A JP H0352804 B2 JPH0352804 B2 JP H0352804B2
- Authority
- JP
- Japan
- Prior art keywords
- target object
- shape
- cross
- section
- shadow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 42
- 238000005259 measurement Methods 0.000 claims description 32
- 238000003384 imaging method Methods 0.000 claims description 31
- 230000003287 optical effect Effects 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000011295 pitch Substances 0.000 description 10
- 239000002585 base Substances 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 7
- 238000003698 laser cutting Methods 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 238000000691 measurement method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000010365 information processing Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000033458 reproduction Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000003637 basic solution Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2518—Projection by scanning of the object
- G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
Landscapes
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2088584A JPS60165505A (ja) | 1984-02-09 | 1984-02-09 | 対象物体の立体形状を計測する装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2088584A JPS60165505A (ja) | 1984-02-09 | 1984-02-09 | 対象物体の立体形状を計測する装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60165505A JPS60165505A (ja) | 1985-08-28 |
JPH0352804B2 true JPH0352804B2 (enrdf_load_stackoverflow) | 1991-08-13 |
Family
ID=12039654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2088584A Granted JPS60165505A (ja) | 1984-02-09 | 1984-02-09 | 対象物体の立体形状を計測する装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60165505A (enrdf_load_stackoverflow) |
-
1984
- 1984-02-09 JP JP2088584A patent/JPS60165505A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60165505A (ja) | 1985-08-28 |
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