JPH0351881Y2 - - Google Patents
Info
- Publication number
- JPH0351881Y2 JPH0351881Y2 JP2089085U JP2089085U JPH0351881Y2 JP H0351881 Y2 JPH0351881 Y2 JP H0351881Y2 JP 2089085 U JP2089085 U JP 2089085U JP 2089085 U JP2089085 U JP 2089085U JP H0351881 Y2 JPH0351881 Y2 JP H0351881Y2
- Authority
- JP
- Japan
- Prior art keywords
- anode
- ray
- characteristic
- rays
- zone plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005211 surface analysis Methods 0.000 description 4
- 230000005469 synchrotron radiation Effects 0.000 description 4
- 238000001015 X-ray lithography Methods 0.000 description 3
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000001420 photoelectron spectroscopy Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003963 x-ray microscopy Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2089085U JPH0351881Y2 (US20020051482A1-20020502-M00012.png) | 1985-02-15 | 1985-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2089085U JPH0351881Y2 (US20020051482A1-20020502-M00012.png) | 1985-02-15 | 1985-02-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61136462U JPS61136462U (US20020051482A1-20020502-M00012.png) | 1986-08-25 |
| JPH0351881Y2 true JPH0351881Y2 (US20020051482A1-20020502-M00012.png) | 1991-11-08 |
Family
ID=30511790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2089085U Expired JPH0351881Y2 (US20020051482A1-20020502-M00012.png) | 1985-02-15 | 1985-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0351881Y2 (US20020051482A1-20020502-M00012.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017220360A (ja) * | 2016-06-07 | 2017-12-14 | Ｊｘ金属株式会社 | 非導電性試料のグロー放電質量分析法 |
-
1985
- 1985-02-15 JP JP2089085U patent/JPH0351881Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61136462U (US20020051482A1-20020502-M00012.png) | 1986-08-25 |
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