JPH0350665B2 - - Google Patents

Info

Publication number
JPH0350665B2
JPH0350665B2 JP60206481A JP20648185A JPH0350665B2 JP H0350665 B2 JPH0350665 B2 JP H0350665B2 JP 60206481 A JP60206481 A JP 60206481A JP 20648185 A JP20648185 A JP 20648185A JP H0350665 B2 JPH0350665 B2 JP H0350665B2
Authority
JP
Japan
Prior art keywords
wafer
supported
grinding
grindstone
grinding wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60206481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6268262A (ja
Inventor
Satoshi Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Seiko Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Seiko Ltd filed Critical Hitachi Seiko Ltd
Priority to JP20648185A priority Critical patent/JPS6268262A/ja
Publication of JPS6268262A publication Critical patent/JPS6268262A/ja
Publication of JPH0350665B2 publication Critical patent/JPH0350665B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP20648185A 1985-09-20 1985-09-20 平面研削盤 Granted JPS6268262A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20648185A JPS6268262A (ja) 1985-09-20 1985-09-20 平面研削盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20648185A JPS6268262A (ja) 1985-09-20 1985-09-20 平面研削盤

Publications (2)

Publication Number Publication Date
JPS6268262A JPS6268262A (ja) 1987-03-28
JPH0350665B2 true JPH0350665B2 (US06650917-20031118-M00005.png) 1991-08-02

Family

ID=16524086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20648185A Granted JPS6268262A (ja) 1985-09-20 1985-09-20 平面研削盤

Country Status (1)

Country Link
JP (1) JPS6268262A (US06650917-20031118-M00005.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3978002B2 (ja) * 2001-07-13 2007-09-19 株式会社和井田製作所 研削盤におけるワークと砥石との相対位置関係調節装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662753A (en) * 1979-10-17 1981-05-28 Tdk Corp Surface grinder
JPS56139865A (en) * 1980-03-31 1981-10-31 Toshiba Corp Grinding machine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662753A (en) * 1979-10-17 1981-05-28 Tdk Corp Surface grinder
JPS56139865A (en) * 1980-03-31 1981-10-31 Toshiba Corp Grinding machine

Also Published As

Publication number Publication date
JPS6268262A (ja) 1987-03-28

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