JPH0350417B2 - - Google Patents

Info

Publication number
JPH0350417B2
JPH0350417B2 JP60121684A JP12168485A JPH0350417B2 JP H0350417 B2 JPH0350417 B2 JP H0350417B2 JP 60121684 A JP60121684 A JP 60121684A JP 12168485 A JP12168485 A JP 12168485A JP H0350417 B2 JPH0350417 B2 JP H0350417B2
Authority
JP
Japan
Prior art keywords
leg
legs
alignment direction
detecting
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60121684A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61279146A (ja
Inventor
Hirofumi Takase
Takashi Matsumoto
Hiroaki Nishikuma
Hiroyuki Matsumoto
Toshihiko Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NHK Spring Co Ltd
Original Assignee
NHK Spring Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NHK Spring Co Ltd filed Critical NHK Spring Co Ltd
Priority to JP60121684A priority Critical patent/JPS61279146A/ja
Publication of JPS61279146A publication Critical patent/JPS61279146A/ja
Publication of JPH0350417B2 publication Critical patent/JPH0350417B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60121684A 1985-06-05 1985-06-05 電子部品の脚片の不良検出装置 Granted JPS61279146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60121684A JPS61279146A (ja) 1985-06-05 1985-06-05 電子部品の脚片の不良検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60121684A JPS61279146A (ja) 1985-06-05 1985-06-05 電子部品の脚片の不良検出装置

Publications (2)

Publication Number Publication Date
JPS61279146A JPS61279146A (ja) 1986-12-09
JPH0350417B2 true JPH0350417B2 (enExample) 1991-08-01

Family

ID=14817312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60121684A Granted JPS61279146A (ja) 1985-06-05 1985-06-05 電子部品の脚片の不良検出装置

Country Status (1)

Country Link
JP (1) JPS61279146A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122557A (en) * 1981-01-23 1982-07-30 Nec Kyushu Ltd Inspecting device for lead bent of semiconductor device
JPS5870110A (ja) * 1981-08-03 1983-04-26 マイクロコンポ−ネント　テクノロジ−　インコ−ポレ−テツド リ−ド整列状態検査装置

Also Published As

Publication number Publication date
JPS61279146A (ja) 1986-12-09

Similar Documents

Publication Publication Date Title
US6608320B1 (en) Electronics assembly apparatus with height sensing sensor
KR0185693B1 (ko) 고정밀 부품 얼라이먼트 센서 시스템
US6762847B2 (en) Laser align sensor with sequencing light sources
US11982522B2 (en) Three-dimensional measuring device
US5208463A (en) Method and apparatus for detecting deformations of leads of semiconductor device
JP3430780B2 (ja) 物体表面の形状検出方法
EP0919804A1 (en) Inspection system for planar object
US20110175997A1 (en) High speed optical inspection system with multiple illumination imagery
US6909515B2 (en) Multiple source alignment sensor with improved optics
WO2002023123A1 (fr) Capteur optique
US6188784B1 (en) Split optics arrangement for vision inspection/sorter module
JP2003282675A (ja) ウエハマッピング装置
JP4191295B2 (ja) 半導体パッケージの検査装置
US4875779A (en) Lead inspection system for surface-mounted circuit packages
JPH0350417B2 (enExample)
KR101022302B1 (ko) 개선된 옵틱스를 갖는 다중 소스 정렬 센서
US6291830B1 (en) Methods and apparatus for controlling glint in a position alignment sensor
JPH0350416B2 (enExample)
JPS61279143A (ja) 電子部品の脚片の不良検出装置
JP3692587B2 (ja) 実装部品の検査方法及びそれを用いた検査装置
JPS61246609A (ja) 形状検査装置
JPH0460201B2 (enExample)
JPS6166952A (ja) 物品外表面の検査方法
JPS61279144A (ja) 電子部品の脚片の不良検出装置
JPH09166424A (ja) フラットパッケージのピン曲がりの検出装置