JPH03503932A - 加速度計 - Google Patents

加速度計

Info

Publication number
JPH03503932A
JPH03503932A JP50513489A JP50513489A JPH03503932A JP H03503932 A JPH03503932 A JP H03503932A JP 50513489 A JP50513489 A JP 50513489A JP 50513489 A JP50513489 A JP 50513489A JP H03503932 A JPH03503932 A JP H03503932A
Authority
JP
Japan
Prior art keywords
filament
filaments
inertial mass
converter according
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50513489A
Other languages
English (en)
Japanese (ja)
Inventor
マイルス,デニス・ジヨン
スミス,シドニー・ジヨージ
Original Assignee
イギリス国
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by イギリス国 filed Critical イギリス国
Publication of JPH03503932A publication Critical patent/JPH03503932A/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/122Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by metal resistance strain gauges, e.g. wire resistance strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)
JP50513489A 1988-04-25 1989-04-25 加速度計 Pending JPH03503932A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8809755.5 1988-04-25
GB8809755A GB8809755D0 (en) 1988-04-25 1988-04-25 Accelerometer

Publications (1)

Publication Number Publication Date
JPH03503932A true JPH03503932A (ja) 1991-08-29

Family

ID=10635805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50513489A Pending JPH03503932A (ja) 1988-04-25 1989-04-25 加速度計

Country Status (4)

Country Link
EP (1) EP0412106A1 (fr)
JP (1) JPH03503932A (fr)
GB (2) GB8809755D0 (fr)
WO (1) WO1989010567A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02129513A (ja) * 1988-11-09 1990-05-17 Aisin Seiki Co Ltd 二軸回転検出装置
FR2656929B1 (fr) * 1990-01-11 1994-05-13 Etat Francais Delegue Armement Accelerometre differentiel a resonateurs piezoelectriques.
US5165289A (en) * 1990-07-10 1992-11-24 Johnson Service Company Resonant mechanical sensor
US5233874A (en) * 1991-08-19 1993-08-10 General Motors Corporation Active microaccelerometer
US5355712A (en) * 1991-09-13 1994-10-18 Lucas Novasensor Method and apparatus for thermally actuated self testing of silicon structures
JP3311633B2 (ja) * 1997-04-04 2002-08-05 日本碍子株式会社 センサユニット
DE19812773C2 (de) 1998-03-24 2002-11-14 Conti Temic Microelectronic Mikrosensor mit einer Resonatorstruktur
EP1083430B1 (fr) * 1999-09-10 2006-07-26 STMicroelectronics S.r.l. Capteur inertiel semiconductrice integré, avec micro-actioneur pour calibration
GB2505875A (en) 2012-09-04 2014-03-19 Cambridge Entpr Ltd Dual and triple axis inertial sensors and methods of inertial sensing
US10168194B2 (en) 2015-12-24 2019-01-01 Analog Devices, Inc. Method and apparatus for driving a multi-oscillator system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1243895B (de) * 1961-07-14 1967-07-06 Litton Industries Inc Elektromechanischer Messumformer zur Messung einer Kraft, insbesondere zur Verwendung als Beschleunigungsmesser
US3303452A (en) * 1964-05-12 1967-02-07 Textron Electronics Inc Piezoresistive device
GB2174500B (en) * 1985-05-04 1988-02-10 Stc Plc Accelerometer

Also Published As

Publication number Publication date
GB9023236D0 (en) 1991-02-27
WO1989010567A1 (fr) 1989-11-02
EP0412106A1 (fr) 1991-02-13
GB2238874B (en) 1992-02-12
GB8809755D0 (en) 1988-06-02
GB2238874A (en) 1991-06-12

Similar Documents

Publication Publication Date Title
Maenaka et al. Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass
US4381672A (en) Vibrating beam rotation sensor
US6487864B1 (en) Cyrogenic inertial micro-electro-mechanical system (MEMS) device
US5233874A (en) Active microaccelerometer
JP3483567B2 (ja) 一体化センサを備えたモノリシックシリコン・レートジャイロ
Zook et al. Characteristics of polysilicon resonant microbeams
US4479385A (en) Double resonator cantilever accelerometer
JP4343273B2 (ja) 温度不感性シリコン発振器及びそれから形成された精密電圧基準
US7481112B2 (en) Silicon inertial sensors formed using MEMS
US6662658B2 (en) Whiffletree accelerometer
JP3834397B2 (ja) レートセンサ
US9261525B2 (en) MEMS inertial sensor and method of inertial sensing
JP3102320B2 (ja) センサ装置
US5677485A (en) Acceleration sensor with compensation for ambient temperature change
JPH03503932A (ja) 加速度計
WO1994014035A1 (fr) Transducterur de force et detecteur de temperature combine
US6453744B2 (en) Low radiation capture cross-section electrode material for prompt radiation environments
GB2577483A (en) Inertial sensor and method of inertial sensing with tuneable mode coupling strength
US5315874A (en) Monolithic quartz resonator accelerometer
Söderkvist Design of a solid-state gyroscopic sensor made of quartz
US6044706A (en) Dual axial gyroscope with piezoelectric ceramics
US5461918A (en) Vibrating beam accelerometer
Helsel et al. A navigation grade micro-machined silicon accelerometer
US6257058B1 (en) Silicon gyroscope and method of driving the same
WO1989010568A1 (fr) Transducteur