JPH0350328U - - Google Patents

Info

Publication number
JPH0350328U
JPH0350328U JP11152489U JP11152489U JPH0350328U JP H0350328 U JPH0350328 U JP H0350328U JP 11152489 U JP11152489 U JP 11152489U JP 11152489 U JP11152489 U JP 11152489U JP H0350328 U JPH0350328 U JP H0350328U
Authority
JP
Japan
Prior art keywords
sample
metal film
ion
diagram showing
etching apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11152489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11152489U priority Critical patent/JPH0350328U/ja
Publication of JPH0350328U publication Critical patent/JPH0350328U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP11152489U 1989-09-22 1989-09-22 Pending JPH0350328U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11152489U JPH0350328U (OSRAM) 1989-09-22 1989-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11152489U JPH0350328U (OSRAM) 1989-09-22 1989-09-22

Publications (1)

Publication Number Publication Date
JPH0350328U true JPH0350328U (OSRAM) 1991-05-16

Family

ID=31659996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11152489U Pending JPH0350328U (OSRAM) 1989-09-22 1989-09-22

Country Status (1)

Country Link
JP (1) JPH0350328U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002360321A (ja) * 2001-06-12 2002-12-17 Etsuzo Fukuda 杖の支持装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272537A (ja) * 1986-05-21 1987-11-26 Hitachi Ltd イオンビ−ム加工方法
JPS63155727A (ja) * 1986-12-19 1988-06-28 Hitachi Ltd 低温ドライエツチング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272537A (ja) * 1986-05-21 1987-11-26 Hitachi Ltd イオンビ−ム加工方法
JPS63155727A (ja) * 1986-12-19 1988-06-28 Hitachi Ltd 低温ドライエツチング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002360321A (ja) * 2001-06-12 2002-12-17 Etsuzo Fukuda 杖の支持装置

Similar Documents

Publication Publication Date Title
JPH0350328U (OSRAM)
JP2513136Y2 (ja) イオン注入装置
JPH0241584B2 (OSRAM)
JPS59129872U (ja) プラズマエツチング装置
JPS5837161U (ja) イオンレ−ザ管
JPH0178167U (OSRAM)
JPS61138249U (OSRAM)
JPS61151333U (OSRAM)
JPH0373432U (OSRAM)
JPH0251259U (OSRAM)
JPH0334261U (OSRAM)
JPS6260059U (OSRAM)
JPS62157968U (OSRAM)
JPS59103756U (ja) 高周波プラズマ励起用電極
JPS61206257U (OSRAM)
JPH02113255U (OSRAM)
JPH0456332U (OSRAM)
JPS6093757U (ja) スパツタリング装置
JPS61195550A (ja) イオン源
JPS61180160U (OSRAM)
JPS5861461U (ja) スパツタリング装置
JPH0242061U (OSRAM)
JPS6084057U (ja) 螢光表示管
JPH0380957U (OSRAM)
JPS60181062U (ja) ガスレ−ザ発振器