JPH0350053U - - Google Patents
Info
- Publication number
- JPH0350053U JPH0350053U JP11157289U JP11157289U JPH0350053U JP H0350053 U JPH0350053 U JP H0350053U JP 11157289 U JP11157289 U JP 11157289U JP 11157289 U JP11157289 U JP 11157289U JP H0350053 U JPH0350053 U JP H0350053U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- infrared
- production device
- heating single
- infrared heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の一実施例を示す赤外線加熱単
結晶製造装置を示す縦断面図、第２図は従来の単
結晶製造装置を示す縦断面図である。
２１，２２……回転楕円面鏡、２３，２４……
赤外線ランプ（ハロゲンランプ）、３０……石英
管、３３……軸受、３５……シール部品、３６…
…ベローズ。
FIG. 1 is a vertical cross-sectional view showing an infrared heating single crystal manufacturing apparatus according to an embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view showing a conventional single crystal manufacturing apparatus. 21, 22...Spheroidal mirror, 23, 24...
Infrared lamp (halogen lamp), 30...Quartz tube, 33...Bearing, 35...Seal parts, 36...
...bellows.
Claims (1)
プよりの赤外線を反射させる回転楕円面鏡を用い
て加熱する赤外線加熱単結晶製造装置において、 主軸軸受と石英管側のシール部品とをベローズ
でフレキシブルに接続したことを特徴とする赤外
線加熱単結晶製造装置。[Scope of Claim for Utility Model Registration] In an infrared heating single crystal production device that heats the object to be heated between the raw material rod and the crystal rod using a spheroidal mirror that reflects infrared rays from an infrared lamp, An infrared heating single crystal production device characterized by a flexible connection between the side seal parts and a bellows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11157289U JPH0721572Y2 (en) | 1989-09-22 | 1989-09-22 | Infrared heating single crystal manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11157289U JPH0721572Y2 (en) | 1989-09-22 | 1989-09-22 | Infrared heating single crystal manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0350053U true JPH0350053U (en) | 1991-05-15 |
| JPH0721572Y2 JPH0721572Y2 (en) | 1995-05-17 |
Family
ID=31660042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11157289U Expired - Lifetime JPH0721572Y2 (en) | 1989-09-22 | 1989-09-22 | Infrared heating single crystal manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721572Y2 (en) |
-
1989
- 1989-09-22 JP JP11157289U patent/JPH0721572Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0721572Y2 (en) | 1995-05-17 |
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